New facilities available: Advanced Materials Growth Facilities
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Advanced Materials and Surfaces Group, Prof M E Pemble and Dr Ian Povey
http://www.tyndall.ie/research/ams-group/index.html

Introduction: This new facility  which underpins the recently announced Strategic Research Cluster lead by Martyn Pemble entitled 'FORME'- for 'Functional Oxides and Related Materials for Electronics', contains 3 laboratory scale and 2 commercial scale ALD systems, complete with facilities for full electrical characterisation (J-V, C-V, breakdown voltage, measurement of dielectric constant). Via the facilities available eleswhere within FORME we can arrange for high-resultion TEM analysis and surface analysis by XPS. Tyndall will also be acquring its own new TEM facilities during the latter part of 2008.

Chemical Vapour Deposition:
Atmospheric or reduced pressures, growth of oxides and nitrides e.g. ZnO, TiO₂, GaN, TiN, Al₂O₃, SiO₂, templated growth, surface catalysed CVD

Liquid Injection or Aerosol Assisted Chemical Vapour Deposition (DLICVD and AACVD):
Atmospheric or reduced pressure growth, ZnO, TiO₂, direct nanoparticle incorporation into films, templated growth, use of non-volatile precursors, complex oxides such as perovskites, ferroelectric and ferromagnetic materials

CVD and Aerosol-assisted (direct liquid injection) CVD
AACVD

Atomic Layer Deposition (ALD):
High-k dielectrics inc. HfO₂ and La₂O₃, Al₂O₃, TiO₂, VO₂ thermochromic materials, Pt, Ir, Cu CuO

Experimental reactor ALD1 at Tyndall, equipped with in-situ monitoring facilities (diode laser spectroscopy)

Summer 2008 - We will be taking delivery of 2 commercial (8 inch) scale ALD systems from Cambridge Nanotech

Single chamber Fuji F200 LLC system complete with load lock, spare chamber and remote plasma sources. This will be deployed with in-situ monitoring in the research lab.

Dual chamber Fuji F202 DCS system complete with dual remote plasma sources. The F202 system will be located in the Central Fabrication Facility.

Further details contact: Prof. Martyn E Pemble - Phone: +353 (0)21 490 4456 Email: martyn.pemble@tyndall.ie

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