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Laboratory feature: MEMS Test & Characterisation Laboratory
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 Microsystems Centre
Dr. Conor O'Mahony
www.tyndall.ie/research/mems/

Introduction: MEMS at Tyndall
The term Microelectromechanical Systems (MEMS) broadly describes the use of IC fabrication techniques to create micron-scale, free-standing and often movable sensors, actuators and transducers. Tyndall can offer a full toolkit of MEMS processing facilities to the Irish academic researcher as part of the National Access Programme; these capabilities encompass a wide range of fabrication techniques ranging from surface micromachining and bulk etching to plating and wafer bonding. 

Reflecting the multidisciplinary nature of the subject, MEMS scientists at Tyndall are drawn from a number of complementary research groups, spanning the fields of physics, mechanical engineering, microelectronics and computer science. Together with our academic and industrial partners, we aim to develop micromechanical devices and systems for applications in telecommunications, biomedicine and sensing technologies. Examples of our current research include radio-frequency components for next-generation telecommunications, microneedles for painless drug delivery, wireless environmental sensor nodes and miniaturised spectrometer development.
These research and fabrication capabilities are backed up by a full suite of state-of-the art characterisation tools in our MEMS Characterisation Laboratory, where electromechanical, radio frequency, optical and environmental assessment of MEMS devices is carried out.


MEMS Characterisation Laboratory
Reflecting the multidisciplinary nature of the technology, the MEMS Characterisation Laboratory at Tyndall is equipped with a range of for tools for optical, electromechanical, radio-frequency and environmental measurement of micromechanical devices. Both wafer- and die-level characterisation is possible under a range of atmospheric and environmental conditions. 

Some examples of current laboratory activity include topography measurement of contacting surfaces, on-wafer radio-frequency characterisation of surface micromachined varactors, assessment of the effects of temperature and humidity on dielectric charging in RF switches, evaluation of environmental sensor performance and examination of the switching speed and resonant frequency of electromechanical actuators.

Equipment: Information on the specific equipment available in this laboratory is outlined below

Polytec MSA-400 Micro Systems Analyser

Zygo NewView 5022 white-light interferometer

Agilent E8361A/N5260A Network Analyser Benchtop Climactic Chamber

The Polytec MSA-400 is a state-of-the

art system for static and dynamic

analysis of MEMS and microstructures

Out-of-plane motion up to 30MHz

using laser vibrometry

In-plane motion using stroboscopic imaging

Topography analysis with a vertical resolution of 1Å

The NewView 5022 is a white-light

interferometer for surface profiling and

thin film analysis

Vertical resolution is 1Å

Research applications include:

§  Static & dynamic structural characterisation

§  Thin film thickness & surface roughness analysis

 

The Agilent E8361A/N5260A is a Vector

Network Analyser capable of performing

radio-frequency measurements to

110GHz

  Used in conjunction with a low-loss

Cascade RF probe station

 Temperature control: -55oC - +200oC

 Radio frequency characterisation

used for:

§  Measurement of insertion loss, isolation & return loss of micromachined capacitive switches & varactors

§  Characterisation of highly miniaturised antennas for wireless network applications

The Micro MT225 is a benchtop

climactic chamber with a chamber

volume of 11 litres

 Temperature range:-70°C to +180 °C

 Humidity range:10 to 98%RH

 Research applications include:

§  Characterisation & calibration

of micromachined environmental

sensors

§  Reliability testing of MEMS

 

Pressure and vacuum measurement capabilities Capacitance-Voltage Test Systems CoventorWare Process Design and Device Modelling Software Suite Keithley 4200 Semiconductor Characterisation System

Custom-built vacuum chambers allow

MEMS characterisation at low pressures

Wafer-level test capabilities available

Research applications include:

§  Analysis of micromachined

resonators for

telecommunications applications

§  Calibration of micromachined

pressure and gas sensors

C-V (capacitance-voltage) monitoring is

used to analyse the electromechanical

performance of MEMS

Vertical resolution is 1Å

Commonly used for:

§  Characterisation of switches

and tunable capacitors

§  Extraction of mechanical

properties of thin films   using

pull-in techniques

Coventorware is the industry-standard

simulation tool for MEMS

 Multiphysics platform that handles

combined problems including:

§  Static and dynamic

electromechanical simulation

§  Device design & behavioural

modelling

§  Process modelling & device

layout

§  Thermal analysis

The Keithley 4200 is a parameter

analyser for advanced microelectronic

characterisation

Sub femtoamp resolution

Embedded PC provides familiar GUI & instant data analysis

Used in MEMS for:

§  Characterisation of thermal &

pressure sensors

§  Reliability analysis of

dielectric thin films

For further details on MEMS research at Tyndall, please contact Dr. Conor O’Mahony or visit www.tyndall.ie/research/mems/

Programme Coordinator: Paul Roseingrave | Telephone: +353 (0)21 490 4268 | Email: nap@tyndall.ie

 

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