|
Polytec
MSA-400 Micro Systems Analyser
|
Zygo
NewView 5022 white-light interferometer
|
Agilent
E8361A/N5260A Network Analyser
|
Benchtop
Climactic Chamber
|
|
The
Polytec MSA-400 is a state-of-the
art system for static
and dynamic
analysis of MEMS and
microstructures
Out-of-plane
motion up to 30MHz
using
laser vibrometry
In-plane
motion using stroboscopic imaging
Topography
analysis with a vertical resolution of 1Å |
The NewView 5022
is a
white-light
interferometer for surface profiling and
thin film analysis
Vertical resolution is 1Å
Research applications
include:
§
Static & dynamic
structural characterisation
§
Thin film thickness &
surface roughness analysis
|
The Agilent E8361A/N5260A
is a Vector
Network Analyser capable of performing
radio-frequency measurements to
110GHz
Used in conjunction with
a low-loss
Cascade RF probe station
Temperature control: -55oC
- +200oC
Radio frequency
characterisation
used for:
§
Measurement of insertion
loss, isolation & return loss of micromachined
capacitive switches & varactors
§
Characterisation of
highly miniaturised antennas for wireless network
applications |
The Micro MT225
is a
benchtop
climactic chamber with a chamber
volume of 11
litres
Temperature range:-70°C
to +180 °C
Humidity range:10 to
98%RH
Research applications
include:
§
Characterisation & calibration
of micromachined environmental
sensors
§
Reliability testing of
MEMS |
