The Open Access Characterisation Facility provides an extensive range of both Electrical and MEMS evaluation capabilities. This incorporates all aspects of both wafer level & packaged device analysis with facilities extending to Femto ranges at temperatures ranging from -55’C to 300’C and an RF system that can perform measurements to 110GHz. Areas of current laboratory activity include High K dielectrics, Radfets and Environmental Sensors. Reflecting the multidisciplinary nature of MEMS technology we are also equipped with a range of for tools for optical, electromechanical, radio-frequency and environmental measurement of micromechanical devices. Both wafer- and die-level characterisation is possible under a range of atmospheric and environmental conditions.