1- Cascade SemiAutomatic Prober with AttoGuard chamber and RF
capability
2 - Cascade SemiAutomatic Prober (new)
3 - Cascade Manual Prober (new) |
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Details:
These probe stations between them offer the following
capabilities:
1. 8” wafer probers
2. -55ºC à +300ºC (frost free)
3. EMI-RFI shielded environment >20dBc to 20GHz
4. Light-tight environment
5. Triaxial (enables true kelvin measurements)
6. < 1fA Chuck noise & leakage
7. DC à 40GHz Frequency Range (extendable to 325GHz)
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| 4 - HP4156 Parameter Analyzer |
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Details:
The Agilent 4156A is a precision parameter analyzer used for measuring and analyzing the characteristics of semiconductor devices.
Features Include:
1. The HP4156A has four highly accurate source/monitor units (SMUs), two voltage source units (VSUs), and two voltage measurement units (VMUs)
2. The 4156A extends the current resolution to 1 fA and the accuracy to 20 fA.
3. The HP 4156A is designed for Kelvin connections and has high-resolution SMUs (HRSMUs), so HP4156A is especially suited for low resistance and low current
4. You can measure voltage values with a resolution of 0.2 μV by using the differential measurement mode of
VMUs
5. The HP4156A can perform stress testing. That is, it can force a specified dc voltage or current for the specified
duration
6. HP4156A can be controlled by an external controller via HI-IB by using remote control
commands
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| 5. HP 4284A LCR Meter |
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Details:
The 4284A LCR Meter is an impedance analyser that can be used for advanced CV characterisation.
Features Include:
1. Co-axially shielded probes to wafer level
2. Frequency Range 20Hz to 1Mhz at pFarad
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| 6.
Keithley 4200 Semiconductor Characterisation System |
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Details:
1. The Keithley 4200 is a parameter analyser for advanced
microelectronic characterisation
2. Sub femtoamp resolution
3. Embedded PC provides familiar GUI and instant data
analysis
Used in for:
1. Characterisation of thermal and pressure sensors
2. Reliability analysis of dielectric thin films
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| 7. Agilent B1500 Device Analyzer |
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Details:
The B1500A possesses impressive measurement performance, with available low- current measurement of 0.1 femtoamp and low- voltage measurement resolution of 0.5
microvolts
Basic Features:
1. EasyEXPERT software resident on instrument
2. Performs IV and CV measurements
3. Ten module slots
4. Multiple SMU types available: MPSMU, HPSMU, and HRSMU.
5. Multi- frequency capacitance measurement unit (1 kHz to 5 MHz)
available
6. High- resolution, analog- to- digital converter (ADC) available to all installed
modules
7. High- speed ADC present on each installed SMU
8. 4.2-Amp ground unit
9. SMU/AUX path switching available on the Atto Sense and Switch Unit (ASU)
10. Supported CMU accessories include SMU CMU unify unit (SCUU) and guard switch unit (GSWU)
11. Automatic identification of capacitance measurement accessories (MFCMU)
12. GPIB port for instrument control
13. Self- test, self- calibration, diagnostics
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| 8. Zygo NewView 5022 white-light interferometer |
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Details:
1. The NewView 5022 is a white-light interferometer for surface profiling and thin film analysis
2. Vertical resolution is 1Å
Research applications include:
1. Static structural characterisation
2. Thin film thickness and surface roughness analysis
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| 9. Polytec MSA-400 Micro Systems Analyser |
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Details:
1. The MSA-400 is a state-of-the-art optical system for static and dynamic analysis and characterisation of MEMS structure
2. Scanning laser Doppler vibrometry can analyse out-of-plane motion up to 30MHz
3. In-plane motion characterised using stroboscopic video techniques
4. White-light interferometry determines surface topography
Research applications include:
1. Static and dynamic structural characterisation
2. Switching speed and modal analysis of MEMS
3. Thin film thickness and surface roughness analysis
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| 10. RF Probe Station & Vector Network Analyser (40GHz) |
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Details:
1. The HP8722D is a Vector Network Analyser capable of performing radio-frequency measurements to 40GHz
2. Used in conjunction with a Cascade RF probe station
Radio frequency characterisation used for:
1. Measurement of insertion loss, isolation and return loss of capacitive switches
2. Characterisation of highly miniaturised micromachined antennas for wireless network applications
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| 11. MEMS Probe Station/HP4275A/Keithley 237 |
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Details:
1. C-V (capacitance-voltage) monitoring is used to analyse the electromechanical performance of MEMS
Commonly used for:
1. Characterisation of switches and tuneable capacitors
2. Extraction of mechanical properties of thin films using pull-in techniques
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| 12. Micro 225 Climactic Chamber |
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Details:
1. The Micro 225 climactic chamber from temperature Applied Sciences is a benchtop environmental chamber
2. Maximum temperature of 180oC
3. Relative humidity range from 10% to 98%RH
Research applications include:
1. Humidity and temperature characterisation
2. Corrosion and failure analysis
3. MEMS reliability evaluation
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