Visualisation Facilities

This versatile, high-resolution electron microscope allows a range of devices to be visualised with lateral resolution down to 4 nm (10 million times smaller than the diameter of a human hair) at beam voltages between 1 kV and 10 kV.

We have developed recipes for high resolution imaging on oxidised silicon substrates to enable complementary visualisation and electrical characterisation of nanoelectronic devices.

This high-resolution scanning probe microscope can be used for atomic/magnetic force microscopy, scanning tunneling microscopy as well as local probe spectroscopy for high resolution topography and spectroscopy.It has a controlled atmosphere facility to allow operation in high vacuum or inert atmosphere environments. The microscope also features a variable temperature capability (100 - 800 K).

This versatile SPM has a large scan range and can accept samples up to 50 mm in diameter and 10 mm thick.

Scan range: 100 x 100 x 11 µm
Lateral resolution: 10 nm
Vertical resolution: 0.05 nm