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Clean-up of III-V Oxides

Related Publications

• Decomposition of Metal Alkylamides, Alkyls, and Halides at Reducible Oxide Surfaces: Mechanism of ‘Clean-up’ During Atomic Layer Deposition of Dielectrics onto III–V Substrates
  Chemistry of Materials volume 26 issue 7 pages 2427 to 2437 (2014)
  Authors: Sylwia Klejna, Simon D. Elliott

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• First-Principles Modeling of the “Clean-Up” of Native Oxides during Atomic Layer Deposition onto III–V Substrates
  The Journal of Physical Chemistry C volume 116 issue 1 pages 643 to 654 (2011)
  Authors: Sylwia Klejna, Simon D. Elliott

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