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Tyndall Equipment Catalogue

3D Virtual Lab Tours

Silicon fab
Block C Flexifab
- Lithography
- Backend Processing
e-beam Lithography
Training fab
SEM/TEM fab
Open Access Characterisation Facility (OACF)
Components Analysis & Packaging
- Environmental Test

Silicon fab

Eaton/Axcelis Ion Implanter	High Temperature Oven	Wet Benches
Plasma Resist Stripper / ESI Asher	Cambridge Nanotech ALD Reactor	Trikon PERIE Plasma Etcher
Trikon M0RI Plasma Etcher	Trikon ICP Metal Plasma Etcher	Trikon Delta PECVD Plasma Etcher
Nordiko 2550 Sputterer (PVD)	Thermco Furnace Tubes	Semitool SAT Wafer Cleaning
AST Rapid Thermal Anneal	EVG120 Automated resist spin-coating and develop system	Ultratech 1500 X1 Stepper
Karl Suss MA8 Mask Aligner

Block C Flexifab

Evatec Clusterline	Lesker Sputterer	Nordiko Sputterer
Oxford PVD Sputterer	Temescal/Ferrotec UFC4900 e-beam evaporator	Temescal FC2000 e-beam evaporator
STS PECVD System	Leybold Dielectric Coater	Jipelec Rapid Thermal Annealer
Oxford Cobra Etcher (Cl-based chemistry)	Synapse Etcher (F-based chemistry)	SPTS Xactix Xenon Difluoride (XeF2) Etcher
MEMSstar Orbis Vapour HF Etcher	SPTS Bosch Etcher	Woollam Ellipsometer
KLA Tencor Profilometer	Nanospec 3000 Optical Characterisation

Lithography (Block C Flexifab)

Jeol Scanning Electron Microscop	Promicron Leica Automated Microscope	EVG Single Wafer Cleaning System
Transfer Printer	AML Wafer Bonder	EVG Wafer Bonder
Karl-Suss MA6 Mask Aligner Karl-Suss MA6 Mask Aligner 2	Karl-Suss MA8 Mask Aligner	Bruker Surface Profiler
EVG Spray Coater Tool	SUSS Coating/Developing System	Leitz Inspection Optical Microscope
SUSS Manual Cluster Resist Coat/Develop Station SUSS Manual Cluster Resist Coat/Develop Station 2

Backend Processing (Block C Flexifab)

Laserod Laser Dicer

Chemical Mechanical Polisher (CMP)

e-beam Lithography

Elionix ELS-G100

SUSS Coating/Developing System

Training fab

Süss Microtec MA1006 Mask Aligner	Vacucell Oven	Moorfield e-beam Evaporator
KLA Tencor P10 Profiler	Jipelec Rapid Thermal Annealing	Filmetrics Thin-film Measurement
Advanced Vacuum PECVD	Plasma Asher	Nikon Eclipse LV150 Microscope

SEM/TEM fab

Tescan Amber X FIB-SEM	Tescan Solaris FIB-SEM	Carl Zeiss Supra 40 SEM
Sample preparation: Wild Heerbrugg M3C Stereo Zoom Microscope AGAR Sputter Coater

Open Access Characterisation Facility (OACF)
[Electrical/Magnetic Characterisation]

Cascade Manual Prober	Cascade Semiautomatic Prober	Cascade Semiautomatic Attoguard Prober
RF Prober	High Power Probe Station	Deep Level Transient Spectrometer (DLTS)
Superconducting Quantum Interference Device (SQUID)	Bruker Atomic Force Microscope (AFM)	BH Loop Tracer
Ryowa Permeameter	Zygo Interferometer	Polytec Interferometer / Laser Doppler Vibrometer (LDV)

Component Analysis & Packaging

LPKF 3D Prototyping System	DISCO DAD3350 Automatic Dicer	DISCO DAD2H6T Semiautomatic Dicing Saw
Microsectioning Station	X-ray & CT-Scan Imaging System	Nanoindenter
Scanning Acoustic Microscope	Keyence 3D Optical Microscope	Instron Mechanical Test System
Ion Beam Milling	Semiautomatic Wire Bonder	Kuliche & Soffa Wire Bonder
Bond Pull & Shear Tester

Environmental Test

Temperature/Humidity Chamber	Temperature Shock Chamber	Votsch LabEvent Temperature Chamber
Salt Mist Chamber

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