- Silicon fab
- Block C Flexifab
- e-beam Lithography
- Training fab
- SEM/TEM fab
- Open Access Characterisation Facility (OACF)
- Components Analysis & Packaging
Silicon fab
Block C Flexifab
Lithography (Block C Flexifab)
Backend Processing (Block C Flexifab)
Laserod Laser Dicer |
Chemical Mechanical Polisher (CMP) |
e-beam Lithography
Elionix ELS-G100 |
SUSS Coating/Developing System |
Training fab
SEM/TEM fab
Tescan Amber X FIB-SEM |
Tescan Solaris FIB-SEM |
Carl Zeiss Supra 40 SEM |
Sample preparation: Wild Heerbrugg M3C Stereo Zoom Microscope AGAR Sputter Coater |
Open Access Characterisation Facility (OACF)
[Electrical/Magnetic Characterisation]
Component Analysis & Packaging
Environmental Test
Temperature/Humidity Chamber |
Temperature Shock Chamber |
Votsch LabEvent Temperature Chamber |
Salt Mist Chamber |