3D Virtual Lab Tours

 


 

Silicon fab

 


Eaton/Axcelis Ion Implanter

High Temperature Oven

Wet Benches

Plasma Resist Stripper / ESI Asher

Cambridge Nanotech ALD Reactor

Trikon PERIE Plasma Etcher

Trikon M0RI Plasma Etcher

Trikon ICP Metal Plasma Etcher

Trikon Delta PECVD Plasma Etcher

Nordiko 2550 Sputterer (PVD)

Thermco Furnace Tubes

Semitool SAT Wafer Cleaning

AST Rapid Thermal Anneal

EVG120 Automated resist spin-coating and develop system

Ultratech 1500 X1 Stepper

Karl Suss MA8 Mask Aligner

 


 

Block C Flexifab


Evatec Clusterline

Lesker Sputterer

Nordiko Sputterer

Oxford PVD Sputterer

Temescal/Ferrotec UFC4900 e-beam evaporator

Temescal FC2000 e-beam evaporator

STS PECVD System

Leybold Dielectric Coater

Jipelec Rapid Thermal Annealer

Oxford Cobra Etcher (Cl-based chemistry)

Synapse Etcher (F-based chemistry)

SPTS Xactix Xenon Difluoride (XeF2) Etcher

MEMSstar Orbis Vapour HF Etcher

SPTS Bosch Etcher

Woollam Ellipsometer

KLA Tencor Profilometer

Nanospec 3000 Optical Characterisation

 


 

Lithography (Block C Flexifab)


Jeol Scanning Electron Microscop

Promicron Leica Automated Microscope

EVG Single Wafer Cleaning System

Transfer Printer

AML Wafer Bonder

EVG Wafer Bonder

Karl-Suss MA6 Mask Aligner

Karl-Suss MA6 Mask Aligner 2

Karl-Suss MA8 Mask Aligner

Bruker Surface Profiler

EVG Spray Coater Tool

SUSS Coating/Developing System

Leitz Inspection Optical Microscope

SUSS Manual Cluster Resist Coat/Develop Station

SUSS Manual Cluster Resist Coat/Develop Station 2

 


 

Backend Processing (Block C Flexifab)


Laserod Laser Dicer

Chemical Mechanical Polisher (CMP)

 


 

e-beam Lithography


Elionix ELS-G100

SUSS Coating/Developing System

 


 

Training fab


Süss Microtec MA1006 Mask Aligner

Vacucell Oven

Moorfield e-beam Evaporator

KLA Tencor P10 Profiler

Jipelec Rapid Thermal Annealing

Filmetrics Thin-film Measurement

Advanced Vacuum PECVD

Plasma Asher

Nikon Eclipse LV150 Microscope

 


 

SEM/TEM fab


Tescan Amber X FIB-SEM

Tescan Solaris FIB-SEM

Carl Zeiss Supra 40 SEM

Sample preparation:
Wild Heerbrugg M3C Stereo Zoom Microscope
AGAR Sputter Coater

Open Access Characterisation Facility (OACF)
[Electrical/Magnetic Characterisation]


Cascade Manual Prober

Cascade Semiautomatic Prober

Cascade Semiautomatic Attoguard Prober

RF Prober

High Power Probe Station

Deep Level Transient Spectrometer (DLTS)

Superconducting Quantum Interference Device (SQUID)

Bruker Atomic Force Microscope (AFM)

BH Loop Tracer

Ryowa Permeameter

Zygo Interferometer

Polytec Interferometer / Laser Doppler Vibrometer (LDV)

Component Analysis & Packaging


LPKF 3D Prototyping System

DISCO DAD3350 Automatic Dicer

DISCO DAD2H6T Semiautomatic Dicing Saw

Microsectioning Station

X-ray & CT-Scan Imaging System

Nanoindenter

Scanning Acoustic Microscope

Keyence 3D Optical Microscope

Instron Mechanical Test System

Ion Beam Milling

Semiautomatic Wire Bonder

Kuliche & Soffa Wire Bonder

Bond Pull & Shear Tester

Environmental Test


Temperature/Humidity Chamber

Temperature Shock Chamber

Votsch LabEvent Temperature Chamber

Salt Mist Chamber