Ray Duffy

MicroNano Systems

Dr Ray Duffy is a Principal Researcher in Tyndall, and a Fellow in the School of Engineering and Architecture, University College Cork. Dr. Duffy’s research explores Emerging Materials and Devices for future nanoelectronic, Quantum, and ICT applications. He actively supervises and mentors post-doctoral researchers, research assistants, PhD candidates, and Masters students.

Previously he was a Senior Scientist at NXP Semiconductors Research, Leuven, Belgium. In this role Dr. Duffy investigated ideas, delivered results, and support for technology transfer to NXP Semiconductors and TSMC Taiwan. The technical missions were to integrate CMOS process modules, with expertise in doping and device architectures for Si FinFETs. Prior to that he was a Senior Scientist at Philips Research, Leuven, Belgium. Dr. Duffy’s role was to explore and support research ideas suitable for technology transfer to Philips Semiconductors Nijmegen, The Netherlands, and the Crolles2Alliance France. The technical missions were to integrate and design novel planar Si CMOS process modules.

Education: 1997 – 2000 : Ph. D., U.C.C., Cork, Ireland. Thesis title : “Scaling embedded non-volatile memories to deep submicron geometries.”. 1995 – 1996 : M. Eng. Sc., U.C.C., Cork, Ireland. Thesis title : “Numerical simulation of non-volatile memory technology.” 1991 – 1994 : B. E. (Electrical), U.C.C., Cork, Ireland.

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Biography

Dr. Ray Duffy is a Principal Researcher at Tyndall National Institute, and a Fellow in the School of Engineering, University College Cork. He has a h-index=24 (Scopus), ~160 research papers, ~20 invited presentations in international conferences across the EU, USA, and Asia.

In the past 5 years he has been Principal Investigator (PI), co-PI, or named Collaborator on Science Foundation Ireland, Enterprise Ireland, and EU H2020 projects, such as “Conformal and non-Destructive doping for gate-all-around nanowire devices” (E.I.-IP-2017-0605), “Investigating Emerging 2D Semiconductor Technologies” (SFI 15/IA/3131), “Silicon Compatible, Direct Band-Gap Nanowire Materials For Beyond-CMOS Devices” (SFI 14/IA/2513).

Dr. Duffy has been a major contributor to the EU Horizon2020 ASCENT project (grant agreement 654384) which offers access to research infrastructure and expertise in advanced Nanoelectronics. Based on the successful evaluation of the next phase, ASCENT+, he will be Tyndall’s leader and contact-point for contributions to the Joint Research Activities of the project in 2020-2023.

Specialties: International experience.
Customer oriented research.
Links to academia.
Dissemination of results in journals and conferences.
Mentoring of students.

Researchgate profile : https://www.researchgate.net/profile/Ray_Duffy2
ORCID profile : http://orcid.org/0000-0002-6362-3489
LinkedIn profile : https://ie.linkedin.com/in/rayduffy

Dr. Duffy’s activities involve Emerging Materials and Devices for future nanoelectronic, ICT, sensing, and quantum applications, including fabrication, characterisation and modelling of nanowire and thin-film devices.

He has been a Symposium Organiser or Technical Program Committee for several international conference spanning areas of modelling, process technology, and novel electron devices.

Dr. Duffy has been Symposium Organiser for European Material Research Society (E-MRS) Spring 2019 Symposium “Advances in silicon-nanoelectronics,-nanostructures and high-efficiency Si-photovoltaics”, E-MRS Fall 2017 Symposium “Integration, metrology and Technology CAD co-development for sub-10nm technology nodes”, E-MRS Spring 2015 Symposium “Nanomaterials and Processes for Advanced Semiconductor CMOS Devices”, and E-MRS Spring 2005 Symposium “Material science and devices issues for future generation Si-based technologies”.  

He was on the Technical Program Committee for the Ion Implantation Technology conference 2012, 2014, 2016, 2018, 2020 (process technology); SISPAD 2018 (modelling), and IEEENANO 2018 (novel electron devices).

Dr. Duffy has been a regular peer reviewer of international journals for nearly 20 years in the fields of engineering, chemistry, and physics. Journal titles include IEEE Transactions on Electron Devices, IEEE Electron Device Letters, Chemistry of Materials, Journal of Applied Physics, Applied Physics Letters, ACS Omega, Journal of Physical Chemistry, Vacuum, Journal of Materials Chemistry C, Beilstein Journal of Nanotechnology, Applied Surface Science, Semiconductor Science And Technology, Physica Status Solidi A, Materials Science In Semiconductor Processing, Nanoscale, Langmuir, ACS Applied Materials & Interfaces, and Advanced Quantum Technologies.

In this role he has had collaborative research projects or technical engagements with international industrial multi

Research Interests

Research Grants

Funder Start Date End Date Title Role
Enterprise Irl 01-JUN-11 01-MAY-18 Travel Support Principal Investigator
Science Foundation of Ireland 01-OCT-09 31-DEC-15 Starting Investigator Research Grant Principal Investigator
Enterprise Irl 18-JAN-13 17-SEP-13 Proposal Preparation Principal Investigator
Enterprise Irl 18-NOV-14 17-AUG-15 EI – CS-2014-1142- Process and Physical Modelling for CMOS Innovation Ray Duffy [X] Principal Investigator
Enterprise Irl 01-NOV-15 30-OCT-17 Conformal and non-destructive doping of high mobility materials Principal Investigator
Industry 01-NOV-15 30-OCT-17 Conformal and non-destructive doping of high mobility materials – Industry Portion -App. Materials Principal Investigator
Irish Research Council 02-JAN-16 31-JAN-20 Two Dimensional Semiconductor Materials For Future Materials Principal Investigator
Enterprise Irl 01-NOV-17 29-FEB-20 Conformal and non destructive doping towards gate all around nanowire devices Principal Investigator
Industry/EI Projects 01-NOV-17 28-FEB-20 Conformal and non destructive doping towards gate all around nanowire devices Principal Investigator
Enterprise Irl 01-APR-19 31-AUG-21 Passivation and characterisation of germanium nanostructures and devices Principal Investigator
Industry/EI Projects 01-APR-19 31-AUG-22 Passivation and characterisation of germanium nanostructures and devices Principal Investigator
Miscellaneous 01-NOV-20 30-SEP-22 Tyndall Internal Catalyst Award_ICA_2021_R Duffy_N Petkov Principal Investigator
HEACOVID19 01-APR-21 31-JUL-21 Extensions_2-Tyndall allocation-IP-2018-0757B-Ray Duffy Principal Investigator

Publications

Peer Reviewed Journals

Year Journal Publication
2021 Acs Applied Materials & Interfaces Femtosecond Laser-Induced Crystallization of Amorphous Silicon Thin Films under a Thin Molybdenum Layer
Farid, N;Brunton, A;Rumsby, P;Monaghan, S;Duffy, R;Hurley, P;Wang, MQ;Choy, KL;O'Connor, GM (2021) Femtosecond Laser-Induced Crystallization of Amorphous Silicon Thin Films under a Thin Molybdenum Layer. : AMER CHEMICAL SOC.
2021 Solid-State Electronics Investigating interface states and oxide traps in the MoS2/oxide/Si system
Coleman, E;Mirabelli, G;Bolshakov, P;Zhao, P;Caruso, E;Gity, F;Monaghan, S;Cherkaoui, K;Balestra, V;Wallace, RM;Young, CD;Duffy, R;Hurley, PK (2021) Investigating interface states and oxide traps in the MoS2/oxide/Si system. : PERGAMON-ELSEVIER SCIENCE LTD.
2021 Acs Applied Nano Materials Stretching the Equilibrium Limit of Sn in Ge1- xSnxNanowires: Implications for Field Effect Transistors
Biswas, S.; Doherty, J.; Galluccio, E.; Manning, H.; Conroy, M.; Duffy, R.; Bangert, U.; Boland, J.; Holmes, J. D. (2021) Stretching the Equilibrium Limit of Sn in Ge1- xSnxNanowires: Implications for Field Effect Transistors. : .
2021 Solid-State Electronics Performance and reliability in back-gated CVD-grown MoS2 devices
Marquez, C;Salazar, N;Gity, F;Galdon, JC;Navarro, C;Duffy, R;Hurley, P;Gamiz, F (2021) Performance and reliability in back-gated CVD-grown MoS2 devices. : PERGAMON-ELSEVIER SCIENCE LTD.
2020 Materials Science In Semiconductor Processing Cell formation in stanogermanides using pulsed laser thermal anneal on Ge0.91Sn0.09
Galluccio, Emmanuele; Mirabelli; Gioele; Harvey, Alan; Conroy, Michele; Napolitani, Enrico; Duffy, Ray (2020) Cell formation in stanogermanides using pulsed laser thermal anneal on Ge0.91Sn0.09. : .
2020 Langmuir : the ACS journal of surfaces and colloids Monolayer Doping of Germanium with Arsenic: A New Chemical Route to Achieve Optimal Dopant Activation
Kennedy N.;Garvey S.;Maccioni B.;Eaton L.;Nolan M.;Duffy R.;Meaney F.;Kennedy M.;Holmes J.D.;Long B. (2020) Monolayer Doping of Germanium with Arsenic: A New Chemical Route to Achieve Optimal Dopant Activation. : .
2020 Chemistry of Materials Progress on germanium-tin nanoscale alloys
Doherty, J.; Biswas, S.; Gallucio, E.; Broderick, C. A.; Garcia-Gil, A.; Duffy, R.; O’Reilly, E. P.; Holmes, J. D. (2020) Progress on germanium-tin nanoscale alloys. : .
2020 Acs Applied Electronic Materials Field-effect transistor figures of merit for VLS-grown Ge1-xSnx (x = 0.03-0.09) nanowire devices
Galluccio, E.; Doherty, J.; Biswas, S.; Holmes, J. D.; Duffy, R. (2020) Field-effect transistor figures of merit for VLS-grown Ge1-xSnx (x = 0.03-0.09) nanowire devices. : .
2020 Langmuir : the ACS journal of surfaces and colloids Monolayer Doping of Germanium with Arsenic: A New Chemical Route to Achieve Optimal Dopant Activation
Kennedy, N.; Garvey, S.; Maccioni, B.; Eaton, L.; Nolan, M.; Duffy, R.; Meaney, F.; Kennedy, M.; Holmes, J. D.; Long, B. (2020) Monolayer Doping of Germanium with Arsenic: A New Chemical Route to Achieve Optimal Dopant Activation. : .
2019 Journal of Applied Physics Monolayer doping of silicon-germanium alloys: A balancing act between phosphorus incorporation and strain relaxation
Kennedy N.;Duffy R.;Mirabelli G.;Eaton L.;Petkov N.;Holmes J.;Hatem C.;Walsh L.;Long B. (2019) Monolayer doping of silicon-germanium alloys: A balancing act between phosphorus incorporation and strain relaxation. : .
2019 Journal of Applied Physics Exploring conductivity in ex-situ doped Si thin films as thickness approaches 5nm
MacHale, John; Meaney, Fintan; Kennedy, Fintan; Eaton, Luke; Mirabelli, Gioele; White, Mary; Thomas, Kevin; Pelucchi, Emanuele; Hjorth Petersen, Dirch; Lin, Rong; Petkov, Nikolay; Connolly, James; Hatem, Chris; Gity, Farzan; Ansari, Lida; Long, Brenda; Duffy, Ray (2019) Exploring conductivity in ex-situ doped Si thin films as thickness approaches 5nm. : .
2019 Thin Solid Films Formation and characterization of Ni, Pt, and Ti stanogermanide contacts on Ge0.92Sn0.08
Galluccio, E.; Petkov, N.; Mirabelli, G.; Doherty, J.; Lin, S.-Y.; Lu, F.-L.; Liu, C. W.; Holmes, J. D.; Duffy, R. (2019) Formation and characterization of Ni, Pt, and Ti stanogermanide contacts on Ge0.92Sn0.08. : .
2019 ACS Omega Effects of Annealing Temperature and Ambient on Metal/PtSe2 Contact Alloy Formation
Mirabelli G.;Walsh L.;Gity F.;Bhattacharjee S.;Cullen C.;Ó Coileáin C.;Monaghan S.;McEvoy N.;Nagle R.;Hurley P.;Duffy R. (2019) Effects of Annealing Temperature and Ambient on Metal/PtSe2 Contact Alloy Formation. : .
2019 Npj 2d Materials And Applications Quantum confinement-induced semimetal-to-semiconductor evolution in large-area ultra-thin PtSe2 films grown at 400 degrees C
Ansari, L;Monaghan, S;McEvoy, N;Coileain, CO;Cullen, CP;Lin, J;Siris, R;Stimpel-Lindner, T;Burke, KF;Mirabelli, G;Duffy, R;Caruso, E;Nagle, RE;Duesberg, GS;Hurley, PK;Gity, F (2019) Quantum confinement-induced semimetal-to-semiconductor evolution in large-area ultra-thin PtSe2 films grown at 400 degrees C. : SPRINGERNATURE.
2019 Npj 2d Materials And Applications Quantum confinement-induced semimetal-to-semiconductor evolution in large-area ultra-thin PtSe2 films grown at 400 °C
Ansari L.;Monaghan S.;McEvoy N.;Coileáin C.;Cullen C.;Lin J.;Siris R.;Stimpel-Lindner T.;Burke K.;Mirabelli G.;Duffy R.;Caruso E.;Nagle R.;Duesberg G.;Hurley P.;Gity F. (2019) Quantum confinement-induced semimetal-to-semiconductor evolution in large-area ultra-thin PtSe2 films grown at 400 °C. : .
2019 ACS Omega Effects of Annealing Temperature and Ambient on Metal/PtSe2 Contact Alloy Formation
Mirabelli, G;Walsh, LA;Gity, F;Bhattacharjee, S;Cullen, CP;Coileain, CO;Monaghan, S;McEyoy, N;Nagle, R;Hurley, PK;Duffy, R (2019) Effects of Annealing Temperature and Ambient on Metal/PtSe2 Contact Alloy Formation. : AMER CHEMICAL SOC.
2018 Journal of Applied Physics Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation
Duffy, R.; Ricchio, A.; Murphy, R.; Maxwell, G.; Murphy, R.; Piaszenski, G.; Petkov, N.; Hydes, A.; O’Connell, D.; Lyons, C.; Kennedy, N.; Sheehan, B.; Schmidt, M.; Crupi, F.; Holmes, J. D.; Hurley, P. K.; Connolly, J.; Hatem, C.; Long, B. (2018) Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation. : .
2018 Journal of Applied Physics Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation
Duffy, R.; Ricchio, A.; Murphy, R.; Maxwell, G.; Murphy, R.; Piaszenski, G.; Petkov, N.; Hydes, A.; O’Connell, D.; Lyons, C.; Kennedy, N.; Sheehan, B.; Schmidt, M.; Crupi, F.; Holmes, J. D.; Hurley, P. K.; Connolly, J.; Hatem, C.; Long, B. (2018) Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation. : .
2018 Journal of Applied Physics AsH3 gas-phase ex situ doping 3D silicon structures
Duffy, R.; Thomas, K.; Galluccio, E.; Mirabelli, G. Sultan, M.; Kennedy, N. Petkov, N. Maxwell, G.; Hydes, A.; O’Connell, D.; Lyons, C.; Sheehan, B.; Schmidt, M. Holmes, J. D.; Hurley, P. K.; Pelucchi, E. Connolly, J.; Hatem, C.; Long, B. (2018) AsH3 gas-phase ex situ doping 3D silicon structures. : .
2018 Journal of Applied Physics AsH3 gas-phase ex situ doping 3D silicon structures
Duffy, R.;Thomas, K.;Galluccio, E.;Mirabelli, G.;Sultan, M.;Kennedy, N.;Petkov, N.;Maxwell, G.;Hydes, A.;O’Connell, D.;Lyons, C.;Sheehan, B.;Schmidt, M.;Holmes, J. D.;Hurley, P. K.;Pelucchi, E.;Connolly, J.;Hatem, C.;Long, B.; (2018) AsH3 gas-phase ex situ doping 3D silicon structures. : .
2018 Beilstein Journal of Nanotechnology Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates
Kennedy, N.; Duffy, R.; Eaton, L.; O’Connell, D.; Monaghan, S.; Garvey, S.; Connolly, J.; Hatem, C.; Holmes, J. D.; Long, B. (2018) Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates. : .
2018 Apl Materials Nanoscale measurements of phosphorous-induced lattice expansion in nanosecond laser annealed germanium
Boninelli, S;Milazzo, R;Carles, R;Houdellier, F;Duffy, R;Huet, K;La Magna, A;Napolitani, E;Cristiano, F (2018) Nanoscale measurements of phosphorous-induced lattice expansion in nanosecond laser annealed germanium. : AMER INST PHYSICS.
2018 Journal of Applied Physics Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation
Duffy, R. and Ricchio, A. and Murphy, R. and Maxwell, G. and Murphy, R. and Piaszenski, G. and Petkov, N. and Hydes, A. and O’Connell, D. and Lyons, C. and Kennedy, N. and Sheehan, B. and Schmidt, M. and Crupi, F. and Holmes, J.D. and Hurley, P.K. and Connolly, J. and Hatem, C. and Long, B. (2018) Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation. : .
2018 Journal of Applied Physics AsH 3 gas-phase ex situ doping 3D silicon structures
Duffy, R. and Thomas, K. and Galluccio, E. and Mirabelli, G. and Sultan, M. and Kennedy, N. and Petkov, N. and Maxwell, G. and Hydes, A. and O’Connell, D. and Lyons, C. and Sheehan, B. and Schmidt, M. and Holmes, J.D. and Hurley, P.K. and Pelucchi, E. and Connolly, J. and Hatem, C. and Long, B. (2018) AsH 3 gas-phase ex situ doping 3D silicon structures. : .
2017 Materials Science In Semiconductor Processing Doping top-down e-beam fabricated germanium nanowires using molecular monolayers
Long, B.; Alessio Verni, G.; O’Connell, J.; Shayesteh, M.; Gangnaik, A.; Georgiev, Y. M.; Carolan, P.; O’Connell, D.; Kuhn, K. J.; Clendenning, S. B.; Nagle, R.; Duffy, R.; Holmes, J. D. (2017) Doping top-down e-beam fabricated germanium nanowires using molecular monolayers. : .
2017 Materials Science In Semiconductor Processing Modelling doping design in nanowire tunnel-FETs based on group-IV semiconductors
Settino, F.; Crupi, F.; Biswas, S.; Holmes, J. D.; Duffy, R. (2017) Modelling doping design in nanowire tunnel-FETs based on group-IV semiconductors. : .
2017 ACS Omega Liquid-phase monolayer doping of InGaAs with Si-, S- and Sn-containing organic molecular layers
O’Connell, J.; Napolitani, E.; Impellizzeri, G.; Glynn, C.; McGlacken, G. P.; O’Dwyer, C.; Duffy, R.; Holmes, J. D. (2017) Liquid-phase monolayer doping of InGaAs with Si-, S- and Sn-containing organic molecular layers. : .
2017 ACS Omega Liquid-Phase Monolayer Doping of InGaAs with Si-, S- and Sn-Containing Organic Molecular Layers.
O’Connell, J., Napolitani, E., Impellizzeri, G., Glynn, C., McGlacken, G., O’Dwyer, C., Duffy, R. & Holmes, J. D. (2017) Liquid-Phase Monolayer Doping of InGaAs with Si-, S- and Sn-Containing Organic Molecular Layers.. : .
2017 Journal Of Vacuum Science & Technology B, Nanotechnology And Microelectronics: Materials, Processing, Measurement, And Phenomena Enhanced recrystallization and dopant activation of P+ ion-implanted super-thin Ge layers by RF hydrogen plasma treatment
Alexei N. Nazarov,Volodymyr O. Yukhymchuk,Yurii V. Gomeniuk,Sergiy B. Kryvyi,Pavel N. Okholin,Petro M. Lytvyn,Vasyl P. Kladko,Volodymyr S. Lysenko,Volodymyr I. Glotov,Illya E. Golentus,Enrico Napolitani,Ray Duffy (2017) Enhanced recrystallization and dopant activation of P+ ion-implanted super-thin Ge layers by RF hydrogen plasma treatment. : .
2016 Materials Science In Semiconductor Processing Defect evolution and dopant activation in laser annealed Si and Ge
Cristiano, F;Shayesteh, M;Duffy, R;Huet, K;Mazzamuto, F;Qiu, Y;Quillec, M;Henrichsen, HH;Nielsen, PF;Petersen, DH;La Magna, A;Caruso, G;Boninelli, S (2016) Defect evolution and dopant activation in laser annealed Si and Ge. : ELSEVIER SCI LTD.
2016 Acs Applied Materials & Interfaces Monolayer Doping of Si with Improved Oxidation Resistance
O’Connell, J;Collins, G;McGlacken, GP;Duffy, R;Holmes, JD (2016) Monolayer Doping of Si with Improved Oxidation Resistance. : AMER CHEMICAL SOC.
2016 Journal of Applied Physics Air sensitivity of MoS2, MoSe2, MoTe2, HfS2, and HfSe2
Mirabelli, G;McGeough, C;Schmidt, M;McCarthy, EK;Monaghan, S;Povey, IM;McCarthy, M;Gity, F;Nagle, R;Hughes, G;Cafolla, A;Hurley, PK;Duffy, R (2016) Air sensitivity of MoS2, MoSe2, MoTe2, HfS2, and HfSe2. : AMER INST PHYSICS.
2016 Nanotechnology Chemical Approaches for Doping Nanodevice Architectures
O’Connell, J.; Biswas, S.; Duffy, R.; Holmes, J. D. (2016) Chemical Approaches for Doping Nanodevice Architectures. : .
2016 ACS applied materials & interfaces Monolayer doping of Si with improved oxidation resistance
O’Connell, J.; Collins, G.; McGlacken, G. P.; Duffy, R.; Holmes, J. D. (2016) Monolayer doping of Si with improved oxidation resistance. : .
2016 ECS Journal of Solid State Science and Technology Electrical Characterization of the Influence of the Annealing Energy Density on Carrier Lifetimes in Germanium
Filippone, B;Donaldson, C;Shayesteh, M;O’Connell, D;Huet, K;Toque-Tresonne, I;Crupi, F;Duffy, R (2016) Electrical Characterization of the Influence of the Annealing Energy Density on Carrier Lifetimes in Germanium. : ELECTROCHEMICAL SOC INC.
2016 ECS Journal of Solid State Science and Technology Structural and Electrical Investigation of MoS2 Thin Films Formed by Thermal Assisted Conversion of Mo Metal
Duffy, Ray; Foley, Patrick; Filippone, Bruno; Mirabelli, Gioele; O’Connell, Dan; Sheehan, Brendan; Carolan, Pat; Schmidt, Michael; Cherkaoui, Karim; Gatensby, Riley; Hallam, Toby; Duesberg, Georg; Crupi, Felice; Nagle, Roger; Hurley, Paul K. (2016) Structural and Electrical Investigation of MoS2 Thin Films Formed by Thermal Assisted Conversion of Mo Metal. : .
2016 AIP Advances Back-gated Nb-doped MoS2 junctionless field-effect-transistors
Mirabelli, G,Schmidt, M,Sheehan, B,Cherkaoui, K,Monaghan, S,Povey, I,McCarthy, M,Bell, AP,Nagle, R,Crupi, F,Hurley, PK,Duffy, R (2016) Back-gated Nb-doped MoS2 junctionless field-effect-transistors. : .
2016 AIP Advances Back-gated Nb-doped MoS2 junctionless field-effect-transistors
Mirabelli, G. and Schmidt, M. and Sheehan, B. and Cherkaoui, K. and Monaghan, S. and Povey, I. and McCarthy, M. and Bell, A.P. and Nagle, R. and Crupi, F. and Hurley, P.K. and Duffy, R. (2016) Back-gated Nb-doped MoS2 junctionless field-effect-transistors. : .
2016 Materials Science In Semiconductor Processing RF plasma treatment of shallow ion-implanted layers of germanium
Okholin, R;Glotov, VI;Nazarov, AN;Yuchymchuk, VO;Kladko, VP;Kryvyi, SB;Lytvyn, PM;Tiagulskyi, SI;Lysenko, VS;Shayesteh, M;Duffy, R (2016) RF plasma treatment of shallow ion-implanted layers of germanium. : ELSEVIER SCI LTD.
2015 IEEE Transactions on Semiconductor Manufacturing How Target Physical Properties Affect Thin-Body Semiconductor Doping When Using Energetic Ions: A Modeling-Based Analysis
Shayesteh, M;Duffy, R (2015) How Target Physical Properties Affect Thin-Body Semiconductor Doping When Using Energetic Ions: A Modeling-Based Analysis. : IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC.
2015 Acs Applied Materials & Interfaces Organo-arsenic molecular layers on silicon for high density doping
O’Connell, J.; Alessio Verni, G.; Gangnaik, A.; Shayesteh, M.; Long, B.; Georgiev, Y. M.; Petkov, N.; McGlacken, G. P.; Morris, M. A.; Duffy, R.; Holmes, J. D. (2015) Organo-arsenic molecular layers on silicon for high density doping. : .
2014 Physica Status Solidi C – Current Topics In Solid State Physics Characterisation of electrically active defects
Duffy R.;Heringa A. (2014) Characterisation of electrically active defects. : .
2014 IEEE Transactions On Electron Devices Optimized Laser Thermal Annealing on Germanium for High Dopant Activation and Low Leakage Current
Shayesteh, M,O’ Connell, D,Gity, F,Murphy-Armando, P,Yu, R,Huet, K,Toque-Tresonne, I,Cristiano, F,Boninelli, S,Henrichsen, HH,Nielsen, PF,Petersen, DH,Duffy, R (2014) Optimized Laser Thermal Annealing on Germanium for High Dopant Activation and Low Leakage Current. : .
2014 Journal of Materials Chemistry C Access resistance reduction in Ge nanowires and substrates based on non-destructive gas-source dopant in-diffusion
Duffy, R.; Shayesteh, M.; Thomas, K.; Pelucchi, E.; Yu, R.; Gangnaik, A.; Georgiev, Y. M.; Carolan, P.; Petkov, N.; Long, B. Holmes, J. D. (2014) Access resistance reduction in Ge nanowires and substrates based on non-destructive gas-source dopant in-diffusion. : .
2014 Journal of Materials Chemistry C Access resistance reduction in Ge nanowires and substrates based on non-destructive gas-source dopant in-diffusion
Duffy, R.;Shayesteh, M.;Thomas, K.;Pelucchi, E.;Yu, R.;Gangnaik, A.;Georgiev, Y. M.;Carolan, P.;Petkov, N.;Long, B.;Holmes, J. D.; (2014) Access resistance reduction in Ge nanowires and substrates based on non-destructive gas-source dopant in-diffusion. : .
2014 Physica Status Solidi-Rapid Research Letters Junctionless nanowire Transistor fabricated with high mobility Ge channel
Yu, R.; Georgiev, Y. M.; Das, S.; Hobbs, R. G.; Povey, I. M.; Petkov, N.; Shayesteh, M.; O’Connell, D.; Holmes, J. D.; Duffy, R. (2014) Junctionless nanowire Transistor fabricated with high mobility Ge channel. : .
2014 Physica Status Solidi-Rapid Research Letters Junctionless nanowire transistor fabricated with high mobility Ge channel
Yu, R,Georgiev, YM,Das, S,Hobbs, RG,Povey, IM,Petkov, N,Shayesteh, M,O’Connell, D,Holmes, JD,Duffy, R (2014) Junctionless nanowire transistor fabricated with high mobility Ge channel. : .
2014 Physica Status Solidi (C) Current Topics in Solid State Physics Characterisation of electrically active defects
Duffy, R., Heringa, A. (2014) Characterisation of electrically active defects. : .
2014 Semiconductor-On-Insulator Materials For Nanoelectronics Applications Silicon and Germanium Junctionless Nanowire Transistors for Sensing and Digital Electronics Applications
Georgiev, YM,Yu, R,Petkov, N,Lotty, O,Nightingale, AM,deMello, JC,Duffy, R,Holmes, JD,Nazarov, A,Balestra, F,Kilchytska V,Flandre, D (2014) Silicon and Germanium Junctionless Nanowire Transistors for Sensing and Digital Electronics Applications. : .
2014 Physica Status Solidi – Rapid Research Letters Junctionless nanowire transistor fabricated with high mobility Ge channel
Yu, R., Georgiev, Y.M., Das, S., Hobbs, R.G., Povey, I.M., Petkov, N., Shayesteh, M., O’Connell, D., Holmes, J.D., Duffy, R. (2014) Junctionless nanowire transistor fabricated with high mobility Ge channel. : .
2014 Physica Status Solidi (C) Current Topics in Solid State Physics Laser thermal anneal formation of atomically-flat low-resistive germanide contacts
Huet, K., Shayesteh, M., Toqué-Tresonne, I., Negru, R., Daunt, C.L.M., Kelly, N., O’Connell, D., Yu, R., Djara, V., Carolan, P., Petkov, N., Duffy, R. (2014) Laser thermal anneal formation of atomically-flat low-resistive germanide contacts. : .
2014 Physica Status Solidi C – Current Topics In Solid State Physics Laser thermal anneal formation of atomically-flat low-resistive germanide contacts
Huet K.;Shayesteh M.;Toqué-Tresonne I.;Negru R.;Daunt C.;Kelly N.;O’Connell D.;Yu R.;Djara V.;Carolan P.;Petkov N.;Duffy R. (2014) Laser thermal anneal formation of atomically-flat low-resistive germanide contacts. : .
2013 IEEE Transactions On Electron Devices Atomically flat low-resistive germanide contacts formed by laser thermal anneal
Shayesteh, Maryam; Huet, Karim; Toqué-Tresonne, Inès; Negru, Razvan; Daunt, Chris L. M.; Kelly, Niall; O’Connell, Dan; Yu, Ran; Djara, Vladimir; Carolan, Patrick B.; Petkov, Nikolay; Duffy, Ray (2013) Atomically flat low-resistive germanide contacts formed by laser thermal anneal. : .
2013 Solid-State Electronics Impact ionization induced dynamic floating body effect in junctionless transistors
Yu, R,Nazarov, AN,Lysenko, VS,Das, S,Ferain, I,Razavi, P,Shayesteh, M,Kranti, A,Duffy, R,Colinge, JP (2013) Impact ionization induced dynamic floating body effect in junctionless transistors. : .
2013 Solid-State Electronics Impact ionization induced dynamic floating body effect in junctionless transistors
Yu, R., Nazarov, A.N., Lysenko, V.S., Das, S., Ferain, I., Razavi, P., Shayesteh, M., Kranti, A., Duffy, R., Colinge, J.-P. (2013) Impact ionization induced dynamic floating body effect in junctionless transistors. : .
2012 Journal of Applied Physics Molecular dynamics simulation of the regrowth of nanometric multigate Si devices
Marques, LA,Pelaz, L,Santos, I,Lopez, P,Duffy, R (2012) Molecular dynamics simulation of the regrowth of nanometric multigate Si devices. : .
2012 Journal of Applied Physics Molecular dynamics simulation of the regrowth of nanometric multigate Si devices
Marques, LA;Pelaz, L;Santos, I;Lopez, P;Duffy, R (2012) Molecular dynamics simulation of the regrowth of nanometric multigate Si devices. : AMER INST PHYSICS.
2012 IEEE Transactions On Electron Devices Device Design and Estimated Performance for p-Type Junctionless Transistors on Bulk Germanium Substrates
Yu, R,Das, S,Ferain, I,Razavi, P,Shayesteh, M,Kranti, A,Duffy, R,Colinge, JP (2012) Device Design and Estimated Performance for p-Type Junctionless Transistors on Bulk Germanium Substrates. : .
2012 IEEE Transactions On Electron Devices Device Design and Estimated Performance for p-Type Junctionless Transistors on Bulk Germanium Substrates
Yu, R;Das, S;Ferain, I;Razavi, P;Shayesteh, M;Kranti, A;Duffy, R;Colinge, JP (2012) Device Design and Estimated Performance for p-Type Junctionless Transistors on Bulk Germanium Substrates. : IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC.
2012 IEEE Transactions on Electron Devices Device design and estimated performance for p-type junctionless transistors on bulk germanium substrates
Yu, R., Das, S., Ferain, I., Razavi, P., Shayesteh, M., Kranti, A., Duffy, R., Colinge, J.-P. (2012) Device design and estimated performance for p-type junctionless transistors on bulk germanium substrates. : .
2012 Journal of Applied Physics Molecular dynamics simulation of the regrowth of nanometric multigate Si devices
Marqués, L.A., Pelaz, L., Santos, I., López, P., Duffy, R. (2012) Molecular dynamics simulation of the regrowth of nanometric multigate Si devices. : .
2011 IEEE Transactions On Electron Devices NiGe Contacts and Junction Architectures for P and As Doped Germanium Devices
Shayesteh, M,Daunt, CLM,O’Connell, D,Djara, V,White, M,Long, B,Duffy, R (2011) NiGe Contacts and Junction Architectures for P and As Doped Germanium Devices. : .
2011 Applied Physics Letters Characterization of a junctionless diode
Yu, R., Ferain, I., Akhavan, N.D., Razavi, P., Duffy, R., Colinge, J.-P. (2011) Characterization of a junctionless diode. : .
2011 Applied Physics Letters The curious case of thin-body Ge crystallization
Duffy, R., Shayesteh, M., McCarthy, B., Blake, A., White, M., Scully, J., Yu, R., Kelleher, A.-M., Schmidt, M., Petkov, N., Pelaz, L., Marqués, L.A. (2011) The curious case of thin-body Ge crystallization. : .
2011 IEEE Transactions on Electron Devices NiGe contacts and junction architectures for P and As doped germanium devices
Shayesteh, M., Daunt, C.L.L.M., O’Connell, D., Djara, V., White, M., Long, B., Duffy, R. (2011) NiGe contacts and junction architectures for P and As doped germanium devices. : .
2011 Applied Physics Letters Characterization of a junctionless diode
Yu, R;Ferain, I;Akhavan, ND;Razavi, P;Duffy, R;Colinge, JP (2011) Characterization of a junctionless diode. : AMER INST PHYSICS.
2011 Applied Physics Letters The curious case of thin-body Ge crystallization
Duffy, R,Shayesteh, M,McCarthy, B,Blake, A,White, M,Scully, J,Yu, R,Kelleher, AM,Schmidt, M,Petkov, N,Pelaz, L,Marques, LA (2011) The curious case of thin-body Ge crystallization. : .
2011 Applied Physics Letters Characterization of a junctionless diode
Yu, R,Ferain, I,Akhavan, ND,Razavi, P,Duffy, R,Colinge, JP; (2011) Characterization of a junctionless diode. : .
2011 Applied Physics Letters The curious case of thin-body Ge crystallization
Duffy, R;Shayesteh, M;McCarthy, B;Blake, A;White, M;Scully, J;Yu, R;Kelleher, AM;Schmidt, M;Petkov, N;Pelaz, L;Marques, LA (2011) The curious case of thin-body Ge crystallization. : AMER INST PHYSICS.
2011 IEEE Transactions On Electron Devices NiGe Contacts and Junction Architectures for P and As Doped Germanium Devices
Shayesteh, M;Daunt, CLM;O'Connell, D;Djara, V;White, M;Long, B;Duffy, R (2011) NiGe Contacts and Junction Architectures for P and As Doped Germanium Devices. : IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC.
2010 Solid-State Electronics Quantitative prediction of junction leakage in bulk-technology CMOS devices
Duffy, R., Heringa, A., Venezia, V.C., Loo, J., Verheijen, M.A., Hopstaken, M.J.P., van der Tak, K., de Potter, M., Hooker, J.C., Meunier-Beillard, P., Delhougne, R. (2010) Quantitative prediction of junction leakage in bulk-technology CMOS devices. : .
2010 Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Erratum: Experimental studies of dose retention and activation in fin field-effect-transistor-based structures (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures (2010) 28 (C1H5))
Mody, J., Duffy, R., Eyben, P., Goossens, J., Moussa, A., Polspoel, W., Berghmans, B., Van Dal, M.J.H., Pawlak, B.J., Kaiser, M., Weemaes, R.G.R., Vandervorst, W. (2010) Erratum: Experimental studies of dose retention and activation in fin field-effect-transistor-based structures (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures (2010) 28 (C1H5)). : .
2010 Applied Physics Letters The formation, stability, and suitability of n-type junctions in germanium formed by solid phase epitaxial recrystallization
Duffy, R., Shayesteh, M., White, M., Kearney, J., Kelleher, A.-M. (2010) The formation, stability, and suitability of n-type junctions in germanium formed by solid phase epitaxial recrystallization. : .
2010 Applied Physics Letters The formation, stability, and suitability of n-type junctions in germanium formed by solid phase epitaxial recrystallization
Duffy, R;Shayesteh, M;White, M;Kearney, J;Kelleher, AM (2010) The formation, stability, and suitability of n-type junctions in germanium formed by solid phase epitaxial recrystallization. : AMER INST PHYSICS.
2010 Applied Physics Letters The formation, stability, and suitability of n-type junctions in germanium formed by solid phase epitaxial recrystallization
Duffy, R,Shayesteh, M,White, M,Kearney, J,Kelleher, AM; (2010) The formation, stability, and suitability of n-type junctions in germanium formed by solid phase epitaxial recrystallization. : .
2009 Solid-State Electronics Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering
Ferain, I., Duffy, R., Collaert, N., van Dal, M.J.H., Pawlak, B.J., O’Sullivan, B., Witters, L., Rooyackers, R., Conard, T., Popovici, M., van Elshocht, S., Kaiser, M., Weemaes, R.G.R., Swerts, J., Jurczak, M., Lander, R.J.P., De Meyer, K. (2009) Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering. : .
2008 Solid State Phenomena Deep level transient spectroscopy of ultra shallow junctions in Si formed by implantation
Mitromara, N., Evans-Freeman, J.H., Duffy, R. (2008) Deep level transient spectroscopy of ultra shallow junctions in Si formed by implantation. : .
2008 Materials Science Forum Doping strategies for FinFETs
Pawlak, B.J., Duffy, R., De Keersgieter, A. (2008) Doping strategies for FinFETs. : .
2008 Materials Science Forum Extended defects evolution in pre-amorphlsed silicon after millisecond flash anneals
Cristiano, F., Bazizi, E.M., Fazzini, P.F., Boninelli, S., Duffy, R., Pakfar, A., Paul, S., Lerch, W. (2008) Extended defects evolution in pre-amorphlsed silicon after millisecond flash anneals. : .
2008 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Doping fin field-effect transistor sidewalls: Impurity dose retention in silicon due to high angle incident ion implants and the impact on device performance
Duffy, R., Curatola, G., Pawlak, B.J., Doornbos, G., Van Der Tak, K., Breimer, P., Van Berkum, J.G.M., Roozeboom, F. (2008) Doping fin field-effect transistor sidewalls: Impurity dose retention in silicon due to high angle incident ion implants and the impact on device performance. : .
2008 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Evolution of fluorine and boron profiles during annealing in crystalline Si
López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Van Der Tak, K., Breimer, P., Van Berkum, J.G.M., Verheijen, M.A., Kaiser, M. (2008) Evolution of fluorine and boron profiles during annealing in crystalline Si. : .
2008 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Probing doping conformality in fin shaped field effect transistor structures using resistors
Vandervorst, W., Jurczak, M., Everaert, J.-L., Pawlak, B.J., Duffy, R., Del-Agua-Bomiquel, J.-I., Poon, T. (2008) Probing doping conformality in fin shaped field effect transistor structures using resistors. : .
2008 Journal of Applied Physics Si interstitial contribution of F+ implants in crystalline Si
López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Van Der Tak, K., Breimer, P., Van Berkum, J.G.M., Verheijen, M.A., Kaiser, M. (2008) Si interstitial contribution of F+ implants in crystalline Si. : .
2007 Applied Physics Letters Solid phase epitaxy versus random nucleation and growth in sub- 20 nm wide fin field-effect transistors
Duffy, R., Van Dal, M.J.H., Pawlak, B.J., Kaiser, M., Weemaes, R.G.R., Degroote, B., Kunnen, E., Altamirano, E. (2007) Solid phase epitaxy versus random nucleation and growth in sub- 20 nm wide fin field-effect transistors. : .
2006 Applied Physics Letters Groups III and v impurity solubilities in silicon due to laser, flash, and solid-phase-epitaxial-regrowth anneals
Duffy, R., Dao, T., Tamminga, Y., Van Der Tak, K., Roozeboom, F., Augendre, E. (2006) Groups III and v impurity solubilities in silicon due to laser, flash, and solid-phase-epitaxial-regrowth anneals. : .
2006 Applied Physics Letters Suppression of phosphorus diffusion by carbon co-implantation
Pawlak, B.J., Duffy, R., Janssens, T., Vandervorst, W., Felch, S.B., Collart, E.J.H., Cowern, N.E.B. (2006) Suppression of phosphorus diffusion by carbon co-implantation. : .
2006 Applied Physics Letters Physical insight into boron activation and redistribution during annealing after low-temperature solid phase epitaxial regrowth
Aboy, M., Pelaz, L., López, P., Marqús, L.A., Duffy, R., Venezia, V.C. (2006) Physical insight into boron activation and redistribution during annealing after low-temperature solid phase epitaxial regrowth. : .
2006 Applied Physics Letters Diffusion, activation, and regrowth behavior of high dose P implants in Ge
Satta, A., Simoen, E., Duffy, R., Janssens, T., Clarysse, T., Benedetti, A., Meuris, M., Vandervorst, W. (2006) Diffusion, activation, and regrowth behavior of high dose P implants in Ge. : .
2006 IEEE Transactions on Electron Devices Boron pocket and channel deactivation in nMOS transistors with SPER junctions
Duffy, R., Aboy, M., Venezia, V.C., Pelaz, L., Severi, S., Pawlak, B.J., Eyben, P., Janssens, T., Vandervorst, W., Loo, J., Roozeboom, F. (2006) Boron pocket and channel deactivation in nMOS transistors with SPER junctions. : .
2005 Applied Physics Letters Low-temperature diffusion of high-concentration phosphorus in silicon, a preferential movement toward the surface
Duffy, R., Venezia, V.C., Loo, J., Hopstaken, M.J.P., Verheijen, M.A., Van Berkum, J.G.M., Maas, G.C.J., Tamminga, Y., Dao, T., Demeurisse, C. (2005) Low-temperature diffusion of high-concentration phosphorus in silicon, a preferential movement toward the surface. : .
2005 Applied Physics Letters Role of silicon interstitials in boron cluster dissolution
Aboy, M., Pelaz, L., Marqús, L.A., López, P., Barbolla, J., Duffy, R., Venezia, V.C., Griffin, P.B. (2005) Role of silicon interstitials in boron cluster dissolution. : .
2005 Journal of Applied Physics Atomistic analysis of the evolution of boron activation during annealing in crystalline and preamorphized silicon
Aboy, M., Pelaz, L., Marqús, L.A., López, P., Barbolla, J., Duffy, R. (2005) Atomistic analysis of the evolution of boron activation during annealing in crystalline and preamorphized silicon. : .
2005 Applied Physics Letters Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
Pawlak, B.J., Duffy, R., Janssens, T., Vandervorst, W., Maex, K., Smith, A.J., Cowern, N.E.B., Dao, T., Tamminga, Y. (2005) Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth. : .
2005 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Impurity redistribution due to recrystallization of preamorphized silicon
Duffy, R., Venezia, V.C., Van Der Tak, K., Hopstaken, M.J.P., Maas, G.C.J., Roozeboom, F., Tamminga, Y., Dao, T. (2005) Impurity redistribution due to recrystallization of preamorphized silicon. : .
2005 Materials Science and Engineering B: Solid-State Materials for Advanced Technology E-MRS 2005/Symposium D: Materials science and device issues for future Si-based technologies
Pelaz, L., Duffy, R., Cristiano, F., Colombeau, B., Uppal, S. (2005) E-MRS 2005/Symposium D: Materials science and device issues for future Si-based technologies. : .
2005 Materials Science and Engineering B: Solid-State Materials for Advanced Technology Boron activation and redistribution during thermal treatments after solid phase epitaxial regrowth
Aboy, M., Pelaz, L., Barbolla, J., Duffy, R., Venezia, V.C. (2005) Boron activation and redistribution during thermal treatments after solid phase epitaxial regrowth. : .
2005 Materials Science and Engineering B: Solid-State Materials for Advanced Technology Boron diffusion in strained and strain-relaxed SiGe
Wang, C.C., Sheu, Y.M., Liu, S., Duffy, R., Heringa, A., Cowern, N.E.B., Griffin, P.B. (2005) Boron diffusion in strained and strain-relaxed SiGe. : .
2005 Materials Science and Engineering B: Solid-State Materials for Advanced Technology Boron diffusion in amorphous silicon
Venezia, V.C., Duffy, R., Pelaz, L., Hopstaken, M.J.P., Maas, G.C.J., Dao, T., Tamminga, Y., Graat, P. (2005) Boron diffusion in amorphous silicon. : .
2004 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Lindsay, R., Henson, K., Vandervorst, W., Maex, K., Pawlak, B.J., Duffy, R., Surdeanu, R., Stolk, P., Kittl, J.A., Giangrandi, S., Pages, X., Van der Jeugd, K. (2004) Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth. : .
2004 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth
Pawlak, B.J., Lindsay, R., Susdeanu, R., Dieu, B., Geenen, L., Hoflijk, I., Richard, O., Duffy, R., Clarysse, T., Brijs, B., Vandervorst, W., Dachs, C.J.J. (2004) Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth. : .
2004 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Influence of preamorphizatlon and recrystallization on indium doping profiles in silicon
Duffy, R., Venezia, V.C., Heringa, A., Pawlak, B.J., Hopstaken, M.J.P., Tamminga, Y., Dao, T., Roozeboom, F., Wang, C.C., Diaz, C.H., Griffin, P.B. (2004) Influence of preamorphizatlon and recrystallization on indium doping profiles in silicon. : .
2004 Applied Surface Science Effects of crystalline regrowth on dopant profiles in preamorphized silicon
Hopstaken, M.J.P., Tamminga, Y., Verheijen, M.A., Duffy, R., Venezia, V.C., Heringa, A. (2004) Effects of crystalline regrowth on dopant profiles in preamorphized silicon. : .
2004 Applied Physics Letters Boron diffusion in amorphous silicon and the role of fluorine
Duffy, R., Venezia, V.C., Heringa, A., Pawlak, B.J., Hopstaken, M.J.P., Maas, G.C.J., Tamminga, Y., Dao, T., Roozeboom, F., Pelaz, L. (2004) Boron diffusion in amorphous silicon and the role of fluorine. : .
2004 Materials Science and Engineering B: Solid-State Materials for Advanced Technology The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles
Aboy, M., Pelaz, L., Marqués, L.A., Löpez, P., Barbolla, J., Venezia, V.C., Duffy, R., Griffin, P.B. (2004) The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles. : .
2003 Applied Physics Letters Boron uphill diffusion during ultrashallow junction formation
Duffy, R., Venezia, V.C., Heringa, A., Hüsken, T.W.T., Hopstaken, M.J.P., Cowern, N.E.B., Griffin, P.B., Wang, C.C. (2003) Boron uphill diffusion during ultrashallow junction formation. : .
2003 IEEE Transactions On Electron Devices A novel CMOS-compatible top-floating-gate EEPROM cell for embedded applications
Mc Carthy, D;Duane, R;O’Shea, M;Duffy, R;Mc Carthy, K;Kelliher, AM;Concannon, A;Mathewson, A (2003) A novel CMOS-compatible top-floating-gate EEPROM cell for embedded applications. : IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC.
2003 IEEE Transactions On Electron Devices A novel CMOS-compatible top-floating-gate EEPROM cell for embedded applications
Mc Carthy, D., Duane, R., O’Shea, M., Duffy, R., Mc Carthy, K., Kelliher, A.-M., Concannon, A., Mathewson, A. (2003) A novel CMOS-compatible top-floating-gate EEPROM cell for embedded applications. : .
2003 IEEE Transactions On Electron Devices ¿A novel CMOS-compatible top-floating-gate EEPROM cell for embedded applications¿.
7. McCarthy, D., Duane, R., O¿Shea, M., Duffy, R., McCarthy, K.G., Kelleher, A.M., Concannon, A., Mathewson, A; (2003) ¿A novel CMOS-compatible top-floating-gate EEPROM cell for embedded applications¿.. : .
2001 Microelectronics Journal Scaling embedded EEPROMs for the integration in deep submicron technologies
Duffy, R., Concannon, A., Mathewson, A., Lane, B. (2001) Scaling embedded EEPROMs for the integration in deep submicron technologies. : .
2001 Rna-A Publication of The Rna Society Scaling embedded EEPROMs for the integration in deep submicron technologies
Duffy, R,Concannon, A,Mathewson, A,Lane, B; (2001) Scaling embedded EEPROMs for the integration in deep submicron technologies. : .
2001 Microelectronics Journal Scaling embedded EEPROMs for the integration in deep submicron technologies
Duffy, R;Concannon, A;Mathewson, A;Lane, B (2001) Scaling embedded EEPROMs for the integration in deep submicron technologies. : ELSEVIER ADVANCED TECHNOLOGY.
2001 Microelectronics journal Scaling embedded EEPROMs for the integration in deepsubmicron technologies
Duffy, R and Concannon, A and Mathewson, A and Lane, B (2001) Scaling embedded EEPROMs for the integration in deepsubmicron technologies. : .
1999 Microelectronics Reliability SPECIAL SECTION: EU RESEARCH PROJECT PROPHECY PAPERS-Analysis of external latch-up protection test structure design using numerical simulation
Palser, K and Concannon, A and Duffy, R and Mathewson, A (1999) SPECIAL SECTION: EU RESEARCH PROJECT PROPHECY PAPERS-Analysis of external latch-up protection test structure design using numerical simulation. : .
1999 Microelectronics Reliability Analysis of external latch-up protection test structure design using numerical simulation
Palser, K;Concannon, A;Duffy, R;Mathewson, A (1999) Analysis of external latch-up protection test structure design using numerical simulation. : PERGAMON-ELSEVIER SCIENCE LTD.
1999 Microelectronics Reliability Analysis of external latch-up protection test structure design using numerical simulation
Palser, K., Concannon, A., Duffy, R., Mathewson, A. (1999) Analysis of external latch-up protection test structure design using numerical simulation. : .
0 Iee Colloquium (Digest) Advanced Process Development Using Numerical Simulation [B2746]
Duffy, R.; Concannon, A.; Mathewson, A.; (0) Advanced Process Development Using Numerical Simulation [B2746]. : .

Book Chapters

Year Publication
2021 Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors
Duffy, R., Napolitani, E., Cristiano F. (2021) Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors. : Elsevier.
2018 Surface functionalization strategies for monolayer doping
Holmes J.;O’Connell J.;Duffy R.;Long B. (2018) Surface functionalization strategies for monolayer doping. : .
2014 Silicon and germanium junctionless nanowire Transistors for Sensing and Digital Electronics Applications
Georgiev, Y. M.; Yu, R.; Petkov, N.; Lotty, O.; Nightingale, A.; de Mello, J. C.; Duffy, R.; Holmes, J. D. (2014) Silicon and germanium junctionless nanowire Transistors for Sensing and Digital Electronics Applications. : Springer International Publishing.

Conference Publications

Year Publication
2020 ECS Transactions
Duffy R.;Meaney F.;Galluccio E. (2020) ECS Transactions. : .
2019 2019 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS)
Galluccio, E;Petkov, N;Mirabelli, G;Doherty, J;Lin, SY;Lu, FL;Liu, CW;Holmes, JD;Duffy, R (2019) 2019 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS). : IEEE.
2018 IEEE 18th International Workshop on Junction Technology (IWJT)
Duffy, R.; Kennedy, N.; Mirabelli, G.; Galluccio, E.; Hurley, P. K.; Holmes, J. D.; Long, B. (2018) IEEE 18th International Workshop on Junction Technology (IWJT). : .
2018 2017 IEEE 12th Nanotechnology Materials and Devices Conference, NMDC 2017
Gity F.;Ansari L.;Monaghan S.;Mirabelli G.;Torchia P.;Hydes A.;Schmidt M.;Sheehan B.;Mcevoy N.;Hallam T.;Cherkaoui K.;Nagle R.;Duffy R.;Duesberg G.;Hurley P. (2018) 2017 IEEE 12th Nanotechnology Materials and Devices Conference, NMDC 2017. : .
2018 2018 18TH INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY (IWJT)
Duffy, R;Kennedy, N;Mirabelli, G;Galluccio, E;Hurley, PK;Holmes, JD;Long, B (2018) 2018 18TH INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY (IWJT). : IEEE.
2018 2018 22ND INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2018)
MacHale, J;Meaney, F;Sheehan, B;Duffy, R;Kennedy, N;Long, B (2018) 2018 22ND INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2018). : IEEE.
2018 Proceedings of the International Conference on Ion Implantation Technology
Machale J.;Meaney F.;Sheehan B.;Duffy R.;Kennedy N.;Long B. (2018) Proceedings of the International Conference on Ion Implantation Technology. : .
2017 2017 47TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC)
Mirabelli, G;Gity, F;Monaghan, S;Hurley, PK;Duffy, R (2017) 2017 47TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC). : IEEE.
2017 European Solid-State Device Research Conference
Mirabelli G.;Gity F.;Monaghan S.;Hurley P.;Duffy R. (2017) European Solid-State Device Research Conference. : .
2017 2017 IEEE INTERNATIONAL CONFERENCE ON IC DESIGN AND TECHNOLOGY (ICICDT)
Ponath, P;Posadas, AB;Ren, Y;Wu, XY;Lai, KJ;Demkov, A;Schmidt, M;Duffy, R;Hurley, P;Wang, J;Young, C;Vasudevan, RK;Okatan, MB;Jesse, S;Kalinin, SV (2017) 2017 IEEE INTERNATIONAL CONFERENCE ON IC DESIGN AND TECHNOLOGY (ICICDT). : IEEE.
2017 2017 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS 2017)
Monaghan, S;Gity, F;Duffy, R;Mirabelli, G;McCarthy, M;Cherkaoui, K;Povey, IM;Nagle, RE;Hurley, PK;Lindemuth, JR;Napolitani, E (2017) 2017 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS 2017). : IEEE.
2017 Joint International EUROSOl Workshop and International Conference on Ultimate Integration on Silicon-ULIS, EUROSOI-ULIS 2017 – Proceedings
Monaghan S.;Gity F.;Duffy R.;Mirabelli G.;McCarthy M.;Cherkaoui K.;Povey I.;Nagle R.;Hurley P.;Lindemuth J.;Napolitani E. (2017) Joint International EUROSOl Workshop and International Conference on Ultimate Integration on Silicon-ULIS, EUROSOI-ULIS 2017 – Proceedings. : .
2017 2017 IEEE 12TH NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC)
Gity, F;Ansari, L;Monaghan, S;Mirabelli, G;Torchia, P;Hydes, A;Schmidt, M;Sheehan, B;McEvoy, N;Hallam, T;Cherkaoui, K;Nagle, R;Duffy, R;Duesberg, GS;Hurley, PK (2017) 2017 IEEE 12TH NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC). : IEEE.
2016 Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
Nazarov A.;Yukhymchuk V.;Okholin P.;Lytvyn P.;Lysenko V.;Glotov V.;Nazarova T.;Napolitani E.;Duffy R. (2016) Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016. : .
2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)
Murphy-Armando, Felipe; Liu, Chang; Zhao, Yi; Duffy, Ray (2016) 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT). : .
2016 SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS 6
Duffy, R (2016) SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS 6. : ELECTROCHEMICAL SOC INC.
2016 INTERNATIONAL CONFERENCE ON NANOMATERIALS: APPLICATION & PROPERTIES (NAP)
Nazarov, AN;Yukhymchuk, VO;Okholin, PN;Lytvyn, PM;Lysenko, VS;Glotov, VI;Nazarova, TM;Napolitani, E;Duffy, R (2016) INTERNATIONAL CONFERENCE ON NANOMATERIALS: APPLICATION & PROPERTIES (NAP). : IEEE.
2016 2016 13TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)
Murphy-Armando, F;Liu, C;Zhao, Y;Duffy, R (2016) 2016 13TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT). : IEEE.
2014 Proceedings of the International Conference on Ion Implantation Technology
Shayesteh M.;O’Connell D.;Gity F.;Murphy-Armando F.;Yu R.;Huet K.;Toque-Tresonne I.;Cristiano F.;Boninelli S.;Henrichsen H.;Petersen D.;Nielsen P.;Duffy R. (2014) Proceedings of the International Conference on Ion Implantation Technology. : .
2014 Laser thermal annealing of Ge, optimized for highly activated dopants and diode I-ON/I-OFF ratios
Shayesteh, M,Connell, DO,Gity, F,Murphy-Armando, F,Yu, R,Huet, K,Toque-Tresonne, I,Cristiano, F,Boninelli, S,Henrichsen, HH,Petersen, DH,Nielsen, PF,Duffy, R, (2014) Laser thermal annealing of Ge, optimized for highly activated dopants and diode I-ON/I-OFF ratios. : .
2014 2014 20TH INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2014)
Shayesteh, M;Connell, DO;Gity, F;Murphy-Armando, F;Yu, R;Huet, K;Toque-Tresonne, I;Cristiano, F;Boninelli, S;Henrichsen, HH;Petersen, DH;Nielsen, PF;Duffy, R (2014) 2014 20TH INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2014). : IEEE.
2014 Molecular Layer Doping: Non-destructive Doping of Silicon and Germanium
Long, B,Verni, GA,O’Connell, J,Holmes, J,Shayesteh, M,O’Connell, D,Duffy, R, (2014) Molecular Layer Doping: Non-destructive Doping of Silicon and Germanium. : .
2014 Ion Implantation Technology (IIT), 2014 20th International Conference
Long, B.; Verni, G. A.; O’Connell, J.; Shayesteh, M.; O’Connell, D.; Duffy, R.; Holmes, J. D. (2014) Ion Implantation Technology (IIT), 2014 20th International Conference. : .
2014 PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 1
Duffy, R;Heringa, A (2014) PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 1. : WILEY-V C H VERLAG GMBH.
2014 PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 1
Huet, K;Shayesteh, M;Toque-Tresonne, I;Negru, R;Daunt, CLM;Kelly, N;O'Connell, D;Yu, R;Djara, V;Carolan, P;Petkov, N;Duffy, R (2014) PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 1. : WILEY-V C H VERLAG GMBH.
2014 2014 INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY (IWJT)
Duffy, R;Shayesteh, M (2014) 2014 INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY (IWJT). : IEEE.
2014 2014 International Workshop on Junction Technology, IWJT 2014
Duffy R.;Shayesteh M. (2014) 2014 International Workshop on Junction Technology, IWJT 2014. : .
2013 Extended Abstracts of the 13th International Workshop on Junction Technology 2013, IWJT 2013
Duffy R.;Shayesteh M.;Kazadojev I.;Yu R. (2013) Extended Abstracts of the 13th International Workshop on Junction Technology 2013, IWJT 2013. : .
2013 SOLID-STATE ELECTRONICS
Yu, R;Nazarov, AN;Lysenko, VS;Das, S;Ferain, I;Razavi, P;Shayesteh, M;Kranti, A;Duffy, R;Colinge, JP (2013) SOLID-STATE ELECTRONICS. : PERGAMON-ELSEVIER SCIENCE LTD.
2012 ION IMPLANTATION TECHNOLOGY 2012
Shayesteh, M;Djara, V;Schmidt, M;White, M;Kelleher, AM;Duffy, R (2012) ION IMPLANTATION TECHNOLOGY 2012. : AMER INST PHYSICS.
2011 European Solid-State Device Research Conference
Shayesteh M.;Daunt C.;O’Connell D.;Djara V.;White M.;Long B.;Duffy R. (2011) European Solid-State Device Research Conference. : .
2011 Germanium Fin Structure Optimization for Future MugFET and FinFET Applications
Shayesteh, M,Duffy, R,McCarthy, B,Blake, A,White, M,Scully, J,Yu, R,Djara, V,Schmidt, M,Petkov, N,Kelleher, AM,Roozeboom, F,Kwong, DL,Timans, PJ,Gusev, EP,Iwai, H,Ozturk, MC,Narayanan V (2011) Germanium Fin Structure Optimization for Future MugFET and FinFET Applications. : .
2011 SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS
Duffy, R;Shayesteh, M;White, M;Kearney, J;Kelleher, AM (2011) SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS. : ELECTROCHEMICAL SOCIETY INC.
2011 DIELECTRICS IN NANOSYSTEMS -AND- GRAPHENE, GE/III-V, NANOWIRES AND EMERGING MATERIALS FOR POST-CMOS APPLICATIONS 3
Gajula, DR;McNeill, DW;Baine, P;Fleming, P;Duffy, R;Armstrong, BM (2011) DIELECTRICS IN NANOSYSTEMS -AND- GRAPHENE, GE/III-V, NANOWIRES AND EMERGING MATERIALS FOR POST-CMOS APPLICATIONS 3. : ELECTROCHEMICAL SOC INC.
2010 AIP Conference Proceedings
Duffy R.;Shayesteh M. (2010) AIP Conference Proceedings. : .
2010 ION IMPLANTATION TECHNOLOGY 2010
Duffy, R;Shayesteh, M (2010) ION IMPLANTATION TECHNOLOGY 2010. : AMER INST PHYSICS.
2009 2009 IEEE INTERNATIONAL ELECTRON DEVICES MEETING
Pelaz, L;Marques, L;Aboy, M;Lopez, P;Santos, I;Duffy, R (2009) 2009 IEEE INTERNATIONAL ELECTRON DEVICES MEETING. : IEEE.
2009 SOLID-STATE ELECTRONICS
Ferain, I;Duffy, R;Collaert, N;van Dal, MJH;Pawlak, BJ;O’Sullivan, B;Witters, L;Rooyackers, R;Conard, T;Popovici, M;van Elshocht, S;Kaiser, M;Weemaes, RGR;Swerts, J;Jurczak, M;Lander, RJP;De Meyer, K (2009) SOLID-STATE ELECTRONICS. : PERGAMON-ELSEVIER SCIENCE LTD.
1999 Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Palser, K and Concannon, A and Duffy, R and Mathewson, A (1999) Solid-State Device Research Conference, 1999. Proceeding of the 29th European. : .
1999 Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Duffy, R and Concannon, A and Mathewson, A and Slotboom, M and Dormans, D and Wils, N and Verhaar, R (1999) Solid-State Device Research Conference, 1999. Proceeding of the 29th European. : .
1995 IEE Colloquium (Digest)
Duffy R.;Concannon A.;Mathewson A. (1995) IEE Colloquium (Digest). : .

Editorship

Year Publication
2020 Advances in Silicon-Nanoelectronics, Nanostructures and High-Efficiency Si-Photovoltaics
Hiller, D;Duffy, R;Strehle, S;Stradins, P (2020) Advances in Silicon-Nanoelectronics, Nanostructures and High-Efficiency Si-Photovoltaics. : WILEY-V C H VERLAG GMBH.
2017 Preface
Napolitani, E;Williams, J;Duffy, R (2017) Preface. : ELSEVIER SCI LTD.
2016 E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices Preface
Napolitani, E,Duffy, R,Zographos, N,van Dal, M (2016) E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices Preface. : .
2012 Preface: 19th International Conference on Ion Implantation Technology
Pelaz L.;Santos I.;Duffy R.;Torregrosa F.;Bourdelle K. (2012) Preface: 19th International Conference on Ion Implantation Technology. : .

Reviews

Year Publication
2020 Progress on Germanium-Tin Nanoscale Alloys
Doherty, J;Biswas, S;Galluccio, E;Broderick, CA;Garcia-Gil, A;Duffy, R;O'Reilly, EP;Holmes, JD (2020) Progress on Germanium-Tin Nanoscale Alloys. : AMER CHEMICAL SOC.
2016 Chemical approaches for doping nanodevice architectures
O'Connell, J;Biswas, S;Duffy, R;Holmes, JD (2016) Chemical approaches for doping nanodevice architectures. : IOP PUBLISHING LTD.
2014 Processing of germanium for integrated circuits
Duffy R.;Shayesteh M.;Yu R. (2014) Processing of germanium for integrated circuits. : .

Conference Contributions

Year Publication
1998 Simulation based development of EEPROM devices within a 0.35 $mu$m process
Duffy, R and Concannon, A and Mathewson, A and de Graaf, C and Slotboom, M and Verhaar, R (1998) Simulation based development of EEPROM devices within a 0.35 $mu$m process. : .

Professional Activities

Journal Activities

  • IEEE Transactions on Electron Devices – Referee
  • IEEE Electron Device Letters – Referee
  • J Appl Phys – Referee
  • Applied Physics Letters – Referee
  • Vacuum – Referee
  • Journal of Materials Chemistry C – Referee
  • Langmuir – Referee
  • Appl Surf Sci – Referee
  • Semiconductor Science and Technology – Referee
  • Physica Status Solidi A – Referee
  • Mat Sci Semicon Proc – Referee
  • Nanoscale – Referee
  • Beilstein Journal of Nanotechnology – Referee
  • ACS Omega – Referee
  • J. Phys. Chem. – Referee
  • Chemistry of Materials – Referee

Committees

  • European Material Research Society (E-MRS) , Symposium on “Advances in silicon-nanoelectronics, -nanostructures and high-efficiency Si-photovoltaics”
  • European Material Research Society (E-MRS) , Symposium “Integration, metrology and Technology CAD co-development for sub-10nm technology nodes”
  • European Material Research Society (E-MRS), Symposium on ““Nanomaterials and Processes for Advanced Semiconductor CMOS Devices”.
  • Ion Implantation Technology Conference 2012,
  • Ion Implantation Technology Conference 2014,
  • Ion Implantation Technology Conference 2016,
  • Ion Implantation Technology Conference 2018,
  • Ion Implantation Technology Conference 2020,
  • IEEENANO 2018,
  • SISPAD 2018,
  • European Material Research Society (E-MRS) , “Material science and devices issues for future generation Si-based technologies”
  • European Material Research Society (E-MRS),

Professional Associations

  • Team member for More Moore

Teaching Activities

Recent Postgraduates

Student Degree Graduation Year Institution Thesis
Maryam Shayesteh PHD 2014 University College Cork PhD – Novel processes, test structures, and characterisation for future Germanium technologies
Ran Yu PHD 2013 University College Cork PhD – A study of Silicon and Germanium junctionless transistors
Fiachra Harrington 2020 University College Cork ME in Electrical and Electronic Engineering: Disruptive Devices for Quantum Technologies
Vinay Kumar Verma 2020 University College Cork MEngSc in Electrical and Electronic Engineering: Assessing Self Assembled Monolayer Quality on Germanium Devices
Fintan Meaney 2020 University College Cork Masters – Conformal and non-destructive doping towards gate=all-around nanowire devices
Noel Kennedy PHD 2020 University College Cork PhD – Monolayer doping of bulk and thin body Group IV semiconductors
Emmanuele Galluccio PHD 2020 University College Cork PhD – GeSn semiconductor for micro nanoelectronic applications
Gioele Mirabelli PHD 2020 University College Cork PhD – Two-dimensional semiconductors for future electronics
Ilaria Urbani 2021 Master Degree in Physics (primary institution Universita di Padova) – “2D materials and devices”