Tyndall’s Open Access Characterisation facility (OACF) is equipped with state-of-the-art wafer probing systems
Open Access Characterisation facility
Tyndall’s Open Access Characterisation facility (OACF) has recently added Cryogenic electrical characterisation capability to 4K, along with a new High Power Probe Station (3000V/20A) which further enhances the OACF state of the art facilities.
Typical project measurement conducted in this facility include:
• High Voltage/Current IV/CV on Wafer Testing (3000V/20A)
• Superconducting Quantum Interface Device (SQUID)
• Cryogenic electrical characterisation down to 4 Kelvin (-269’ Celsius)
• DLTS (Deep Level Transient Spectroscopy) at Liquid Helium Temperatures (4 kelvin)
• High k dielectric analysis
• Junctionless InGaS mosfets development and characterisation
• Auto and semi-auto wafer level tests and characterisation (-55 to 300°C)
• CV (fF) and iv (fA) characterisation at temperature
• MEMS development and testing
• Magnetic Hysteresis field measurements
The facility supports extensive wafer-level characterisation of CMOS/MEMS test structures, as well as the precision measurement of impedance, capacitance, frequency spectrum, high voltage and high current.
The facility is extensively used by Tyndall research groups who are internationally renowned experts in the area of device and test structure electrical characterisation as part of advanced process developments and materials research. Other capabilities in the laboratory include: Polytec vibrometer, SQUID (Superconducting Quantum Interface Device), Cryogenic test environments that facilitate electrical characterisation to 4K (-269’C), vacuum based measurements; particularly relevant to the static and dynamic analysis of MEMS. This facility is particularly relevant to external users under the ASCENT+ access programme.