- Silicon fab
- Block C Flexifab
- e-beam Lithography
- Training fab
- SEM/TEM fab
- Photonics
- Open Access Characterisation Facility (OACF)
- Components Analysis & Packaging
Silicon fab
Block C Flexifab
Lithography (Block C Flexifab)
Backend Processing (Block C Flexifab)
![]() Laserod Laser Dicer |
![]() Chemical Mechanical Polisher (CMP) |
e-beam Lithography
![]() Elionix ELS-G100 |
![]() SUSS Coating/Developing System |
Training fab
SEM/TEM fab
![]() Tescan Amber X FIB-SEM |
![]() Tescan Solaris FIB-SEM |
![]() Carl Zeiss Supra 40 SEM |
![]() Sample preparation: Wild Heerbrugg M3C Stereo Zoom Microscope AGAR Sputter Coater |
Photonics
![]() High Speed Optical Communications Testbed |
Open Access Characterisation Facility (OACF) [Electrical/Magnetic Characterisation]
Component Analysis & Packaging
Environmental Test
![]() Temperature/Humidity Chamber |
![]() Temperature Shock Chamber |
![]() Votsch LabEvent Temperature Chamber |
![]() Salt Mist Chamber |