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OACF Characterisation Facility

Open Access Characterisation Facility – OACF

Tyndall’s Open Access Characterisation Facility is equipped with state-of-the-art wafer probing systems that facilitate on-wafer RF and DC probing, temperature environmental measurements, wafer level reliability tests and wafer mapping of results.

The ultra-modern Open Access Characterisation Facility
The ultra-modern Open Access Characterisation Facility.

Typical project measurement conducted in this facility include:

  • High k dielectric analysis
  • Junctionless InGaS mosfets development and characterisation
  • Auto and semi-auto wafer level tests and characterisation (-55 to 300°C)
  • CV (fF) and iv (fA) characterisation at temperature
  • MEMS development and testing
  • Micro-needle development
  • RadFet characterisation
  • Magnetic Hysteresis field measurements
  • TXRF X-ray spectroscopy
  • RF characterisation → Marconi area
Example of one of the two semi-automatic Cascade Summit 12000 wafer probers within the OACF laboratory
Example of one of the two semi-automatic Cascade Summit 12000 wafer probers within the OACF laboratory.

The facility supports extensive wafer level characterisation of CMOS/MEMS test structures, as well as the precision measurement of impedance, capacitance, frequency spectrum, voltage, current, etc.  

 

Also available is a 110GHz PNA with microwave attachments to the Cascade prober. The facility is extensively used by several Tyndall groups with internationally renowned expertise in the area of device and test structure electrical characterisation as part of advanced process developments and materials research. Other capabilities in the laboratory include: Polytec vibrometer, Zygo interferometer, vacuum based measurements; particularly relevant to the static and dynamic analysis of MEMS. This facility is particularly relevant to external users under the ASCENT program.

 

Example of B150 DC measurement system used with the Cascade wafer probers
Example of B150 DC measurement system used with the Cascade wafer probers.
Catriona Kenny, Senior Engineer, Richard Fitzgerald, Principal Engineer, Robert Allison, Technology Analyst, Ted O'Shea, Head of Group, John Barry, Principal Engineer, David Nyhan, Senior Engineer, Eoin Sheehan, Staff Researcher

 

Contact enquiry (at) tyndall (dot) ie for all Business Development enquiries

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