Leader in Integrated ICT Hardware & Systems
Functional metal oxides:
-dielectrics (high k materials, tunable refractive index materials)
-semiconductors (n-type TCOs, p-type TCOs)
-metal oxides for gas sensing application
2D materials:
-graphene
-graphene oxide
-MoS2
-black phosphorus
Advanced optical spectroscopy of thin films and their interfaces:
-amorphous to crystalline phase transition
-interfacial properties
-optical properties ( UV down to Far IR spectral range)
-vibrational properties (IR and Raman)
-spectroscopic ellipsometry
-optical spectrophotometry
-surface and tip enhanced IR and Raman spectrocopy
Transparent electronics
Virtual substrates for novel optoelectronic devices and for high efficiency solar cells
Integration of III-V materials on Si
| Funder | Start Date | End Date | Title | Role |
|---|---|---|---|---|
| European Framework Programme Seven (FP7) | 03-SEP-12 | 08-SEP-15 | Carbon Based Smart Systems For wireless applications. |
| Company | Country | Name |
|---|---|---|
| INSA Rennes | FRANCE | Prof. Olivier Durand |
| Thales R&T | FRANCE | Dr. Afshin Ziaei |
| Thales R&T | FRANCE | Dr. Guy Garry |
| INPG-LMGP | FRANCE | Dr. Carmen Jimenez |
| Thales R&T | FRANCE | Dr. Bernard Servet |
| Institul de Chimie Fizica I.G.Murgulescu al Academiei Romane | ROMANIA | Dr Mariuca Gartner |
| Oak Ridge National Laboratory | U.S.A. | Dr. G.E.Jellison |
| University of Versailles | FRANCE | Prof. Yves Dumont |
| Year | Journal | Publication |
|---|---|---|
| 2014 | Applied Surface Science | Effect of nitrogen incorporation on the structural, optical and dielectric properties of reactive sputter grown ITO films Gartner, M. and Stroescu, H. and Marin, A. and Osiceanu, P. and Anastasescu, M. and Stoica, M. and Nicolescu, M. and Duta, M. and Preda, S. and Aperathitis, E. and Pantazis, A. and Kampylafka, V. and Modreanu, M. and Zaharescu, M. (2014) Effect of nitrogen incorporation on the structural, optical and dielectric properties of reactive sputter grown ITO films. : . |
| 2014 | Journal of Biomaterials Applications | Carboxyl functionalised MWCNT/polymethyl methacrylate bone cement for orthopaedic applications Ormsby, R.W. and Modreanu, M. and Mitchell, C.A. and Dunne, N.J. (2014) Carboxyl functionalised MWCNT/polymethyl methacrylate bone cement for orthopaedic applications. : . |
| 2013 | Scripta Materialia | Structural and luminescence properties of HfO2 nanocrystals grown by atomic layer deposition on SiC/SiO2 core/shell nanowires Rossi, F. and Fabbri, F. and Tallarida, M. and Schmeisser, D. and Modreanu, M. and Attolini, G. and Salviati, G. (2013) Structural and luminescence properties of HfO2 nanocrystals grown by atomic layer deposition on SiC/SiO2 core/shell nanowires. : . |
| 2013 | Thin Solid Films | Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films Stroescu, H. and Anastasescu, M. and Preda, S. and Nicolescu, M. and Stoica, M. and Stefan, N. and Kampylafka, V. and Aperathitis, E. and Modreanu, M. and Zaharescu, M. and Gartner, M. (2013) Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films. : . |
| 2013 | Journal of Applied Physics | Electron scattering mechanisms in fluorine-doped SnO2 thin films Rey, G. and Ternon, C. and Modreanu, M. and Mescot, X. and Consonni, V. and Bellet, D. (2013) Electron scattering mechanisms in fluorine-doped SnO2 thin films. : . |
| 2013 | Thin Solid Films | Vibrational properties of SrCu2O2 studied via Density Functional Theory calculations and compared to Raman and infrared spectroscopy measurements Even, J. and Pedesseau, L. and Durand, O. and Modreanu, M. and Huyberechts, G. and Servet, B. and Chaix-Pluchery, O. (2013) Vibrational properties of SrCu2O2 studied via Density Functional Theory calculations and compared to Raman and infrared spectroscopy measurements. : . |
| 2013 | Thin Solid Films | Special issue on "current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012 Modreanu, M. and Durand, O. and Jellison, G.E. and Salviati, G. and Fried, M. (2013) Special issue on "current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012. : . |
| 2012 | Solid-State Electronics | Optimisation and scaling of interfacial GeO 2 layers for high-κ gate stacks on germanium and extraction of dielectric constant of GeO 2 Murad, S.N.A. and Baine, P.T. and McNeill, D.W. and Mitchell, S.J.N. and Armstrong, B.M. and Modreanu, M. and Hughes, G. and Chellappan, R.K. (2012) Optimisation and scaling of interfacial GeO 2 layers for high-κ gate stacks on germanium and extraction of dielectric constant of GeO 2. : . |
| 2012 | Applied Surface Science | Influence of the substrate and nitrogen amount on the microstructural and optical properties of thin r.f.-sputtered ZnO films treated by rapid thermal annealing Nicolescu, M. and Anastasescu, M. and Preda, S. and Stroescu, H. and Stoica, M. and Teodorescu, V.S. and Aperathitis, E. and Kampylafka, V. and Modreanu, M. and Zaharescu, M. and Gartner, M. (2012) Influence of the substrate and nitrogen amount on the microstructural and optical properties of thin r.f.-sputtered ZnO films treated by rapid thermal annealing. : . |
| 2011 | Thin Solid Films | Transparent p/n diode device from a single zinc nitride sputtering target Kambilafka, V. and Kostopoulos, A. and Androulidaki, M. and Tsagaraki, K. and Modreanu, M. and Aperathitis, E. (2011) Transparent p/n diode device from a single zinc nitride sputtering target. : . |
| 2011 | Analyst | Raman spectroscopic monitoring of the osteogenic differentiation of human mesenchymal stem cells McManus, L.L. and Burke, G.A. and McCafferty, M.M. and O'Hare, P. and Modreanu, M. and Boyd, A.R. and Meenan, B.J. (2011) Raman spectroscopic monitoring of the osteogenic differentiation of human mesenchymal stem cells. : . |
| 2011 | Microelectronic Engineering | Investigation of bulk defects in amorphous and crystalline HfO< sub> 2 thin films Modreanu, M and Monaghan, S and Povey, IM and Cherkaoui, K and Hurley, PK and Androulidaki, M (2011) Investigation of bulk defects in amorphous and crystalline HfO< sub> 2 thin films. : . |
| 2010 | Journal of Optoelectronics and Advanced Materials | Investigation of microstructural properties of nitrogen doped ZnO thin films formed by magnetron sputtering on silicon substrate Nicolescu, M. and Anastasescu, M. and Preda, S. and Calderon-Moreno, J.M. and Osiceanu, P. and Gartner, M. and Teodorescu, V.S. and Maraloiu, A.V. and Kampylafka, V. and Aperathitis, E. and Modreanu, M. (2010) Investigation of microstructural properties of nitrogen doped ZnO thin films formed by magnetron sputtering on silicon substrate. : . |
| 2010 | Journal of Optoelectronics and Advanced Materials | Surface topography and optical properties of nitrogen doped ZnO thin films formed by radio frequency magnetron sputtering on fused silica substrates Nicolescu, M. and Anastasescu, M. and Preda, S. and Calderon-Moreno, J.M. and Stroescu, H. and Gartner, M. and Teodorescu, V.S. and Maraloiu, A.V. and Kampylafka, V. and Aperathitis, E. and Modreanu, M. (2010) Surface topography and optical properties of nitrogen doped ZnO thin films formed by radio frequency magnetron sputtering on fused silica substrates. : . |
| 2010 | Physica Status Solidi (A) Applications and Materials Science | Properties of strontium copper oxide (SCO) deposited by PLD using the 308nm laser and formation of SCO/Si heterostructures Louloudakis, D. and Varda, M. and Papadopoulou, E.L. and Kayambaki, M. and Tsagaraki, K. and Kambilafka, V. and Modreanu, M. and Huyberechts, G. and Aperathitis, E. (2010) Properties of strontium copper oxide (SCO) deposited by PLD using the 308nm laser and formation of SCO/Si heterostructures. : . |
| 2009 | Solar Energy Materials and Solar Cells | Optical spectroscopy study of nc-Si-based p-i-n solar cells Sancho-Parramon, J. and Gracin, D. and Modreanu, M. and Gajović, A. (2009) Optical spectroscopy study of nc-Si-based p-i-n solar cells. : . |
| 2009 | Thin Solid Films | Properties of n-type ZnN thin films as channel for transparent thin film transistors Aperathitis, E. and Kambilafka, V. and Modreanu, M. (2009) Properties of n-type ZnN thin films as channel for transparent thin film transistors. : . |
| 2009 | ACS Applied Materials and Interfaces | Effect of annealing on the properties of indium-tin-oxynitride films as ohmic contacts for GaN-based optoelectronic devices Himmerlich, M. and Koufaki, M. and Ecke, G. and Mauder, C. and Cimalla, V. and Schaefer, J.A. and Kondilis, A. and Pelekanos, N.T. and Modreanu, M. and Krischok, S. and Aperathitis, E. (2009) Effect of annealing on the properties of indium-tin-oxynitride films as ohmic contacts for GaN-based optoelectronic devices. : . |
| 2008 | Physica Status Solidi (A) Applications and Materials Science | Study of the growth and annealing conditions of SrCu 2O 2 (SCO) thin films deposited by injection MOCVD Deschanvres, J.L. and Millon, C. and Jimenez, C. and Khan, A. and Roussel, H. and Servet, B. and Durand, O. and Modreanu, M. (2008) Study of the growth and annealing conditions of SrCu 2O 2 (SCO) thin films deposited by injection MOCVD. : . |
| 2008 | Physica Status Solidi (A) Applications and Materials Science | Electrical properties of chlorine-doped ZnO thin films grown by MOCVD Chikoidze, E. and Modreanu, M. and Sallet, V. and Gorochov, O. and Galtier, P. (2008) Electrical properties of chlorine-doped ZnO thin films grown by MOCVD. : . |
| 2008 | Thin Solid Films | Growth and characterisation of CaCu2Ox thin films by pulsed injection MOCVD Deschanvres, J.L. and Jimenez, C. and Rapenne, L. and McSporran, N. and Servet, B. and Durand, O. and Modreanu, M. (2008) Growth and characterisation of CaCu2Ox thin films by pulsed injection MOCVD. : . |
| 2008 | Thin Solid Films | Effect of chlorine doping on electrical and optical properties of ZnO thin films Chikoidze, E. and Nolan, M. and Modreanu, M. and Sallet, V. and Galtier, P. (2008) Effect of chlorine doping on electrical and optical properties of ZnO thin films. : . |
| 2008 | Thin Solid Films | Optical characterization of HfO2 by spectroscopic ellipsometry: Dispersion models and direct data inversion Sancho-Parramon, J. and Modreanu, M. and Bosch, S. and Stchakovsky, M. (2008) Optical characterization of HfO2 by spectroscopic ellipsometry: Dispersion models and direct data inversion. : . |
| 2008 | Journal of Applied Physics | Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation Cherkaoui, K. and Monaghan, S. and Negara, M.A. and Modreanu, M. and Hurley, P.K. and O'Connell, D. and McDonnell, S. and Hughes, G. and Wright, S. and Barklie, R.C. and Bailey, P. and Noakes, T.C.Q. (2008) Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation. : . |
| 2008 | Thin Solid Films | Derivation of the complex refractive index of ITO and ITON films in the infrared region of the spectrum by the analysis of optical measurements Kondilis, A. and Aperathitis, E. and Modreanu, M. (2008) Derivation of the complex refractive index of ITO and ITON films in the infrared region of the spectrum by the analysis of optical measurements. : . |
| 2007 | Thin Solid Films | Extraction of the refractive index profile of thin transparent conductive oxide films from the analysis of reflectance optical spectra Kondilis, A. and Aperathitis, E. and Modreanu, M. (2007) Extraction of the refractive index profile of thin transparent conductive oxide films from the analysis of reflectance optical spectra. : . |
| 2007 | Thin Solid Films | Optical and microstructural properties of p-type SrCu2O2: First principles modeling and experimental studies Modreanu, M. and Nolan, M. and Elliott, S.D. and Durand, O. and Servet, B. and Garry, G. and Gehan, H. and Huyberechts, G. and Papadopoulou, E.L. and Androulidaki, M. and Aperathitis, E. (2007) Optical and microstructural properties of p-type SrCu2O2: First principles modeling and experimental studies. : . |
| 2007 | Surface and Coatings Technology | Study of the growth conditions and characterization of CaCu2Ox and SrCu2Ox thin films Millon, C. and Deschanvres, J.L. and Jiménez, C. and Macsporran, N. and Servet, B. and Durand, O. and Modreanu, M. (2007) Study of the growth conditions and characterization of CaCu2Ox and SrCu2Ox thin films. : . |
| 2007 | Thin Solid Films | Studies of oxide-based thin-layered heterostructures by X-ray scattering methods Durand, O. and Rogers, D. and Teherani, F.H. and Andrieux, M. and Modreanu, M. (2007) Studies of oxide-based thin-layered heterostructures by X-ray scattering methods. : . |
| 2007 | Thin Solid Films | Optical and microstructural properties of p-type SrCu< sub> 2 O< sub> 2: First principles modeling and experimental studies Modreanu, M and Nolan, M and Elliott, SD and Durand, O and Servet, B and Garry, G and Gehan, H and Huyberechts, G and Papadopoulou, EL and Androulidaki, M and others (2007) Optical and microstructural properties of p-type SrCu< sub> 2 O< sub> 2: First principles modeling and experimental studies. : . |
| 2006 | Applied Surface Science | Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films Modreanu, M. and Sancho-Parramon, J. and Durand, O. and Servet, B. and Stchakovsky, M. and Eypert, C. and Naudin, C. and Knowles, A. and Bridou, F. and Ravet, M.-F. (2006) Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films. : . |
| 2006 | Applied Surface Science | Optical characterization and microstructure of BaTiO3 thin films obtained by RF-magnetron sputtering Ianculescu, A. and Gartner, M. and Despax, B. and Bley, V. and Lebey, Th. and Gavrilǎ, R. and Modreanu, M. (2006) Optical characterization and microstructure of BaTiO3 thin films obtained by RF-magnetron sputtering. : . |
| 2006 | Applied Surface Science | Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering Koufaki, M. and Sifakis, M. and Iliopoulos, E. and Pelekanos, N. and Modreanu, M. and Cimalla, V. and Ecke, G. and Aperathitis, E. (2006) Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering. : . |
| 2006 | Applied Surface Science | Stabilization of the anatase phase in TiO2(Fe3+, PEG) nanostructured coatings Trapalis, C. and Gartner, M. and Modreanu, M. and Kordas, G. and Anastasescu, M. and Scurtu, R. and Zaharescu, M. (2006) Stabilization of the anatase phase in TiO2(Fe3+, PEG) nanostructured coatings. : . |
| 2006 | Applied Surface Science | Thin multilayers characterization by grazing X-ray reflectometry and use of Fourier transform Bridou, F. and Gautier, J. and Delmotte, F. and Ravet, M.-F. and Durand, O. and Modreanu, M. (2006) Thin multilayers characterization by grazing X-ray reflectometry and use of Fourier transform. : . |
| 2006 | Semiconductor science and technology | Characterization of Ge-on-Si virtual substrates and single junction GaAs solar cells Ginige, R and Corbett, B and Modreanu, M and Barrett, C and Hilgarth, J and Isella, G and Chrastina, D and von K"anel, H (2006) Characterization of Ge-on-Si virtual substrates and single junction GaAs solar cells. : . |
| 2006 | Applied Surface Science | Optical characterization of InxGa1-xN alloys Gartner, M. and Kruse, C. and Modreanu, M. and Tausendfreund, A. and Roder, C. and Hommel, D. (2006) Optical characterization of InxGa1-xN alloys. : . |
| 2006 | Semiconductor Science and Technology | Characterization of Ge-on-Si virtual substrates and single junction GaAs solar cells Ginige, R. and Corbett, B. and Modreanu, M. and Barrett, C. and Hilgarth, J. and Isella, G. and Chrastina, D. and Von Känel, H. (2006) Characterization of Ge-on-Si virtual substrates and single junction GaAs solar cells. : . |
| 2005 | Microelectronics Reliability | Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD Decams, J.M. and Guillon, H. and Jiménez, C. and Audier, M. and Sénateur, J.P. and Dubourdieu, C. and Cadix, O. and O'Sullivan, B.J. and Modreanu, M. and Hurley, P.K. and Rusworth, S. and Leedham, T.J. and Davies, H. and Fang, Q. and Boyd, I. (2005) Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD. : . |
| 2005 | Microelectronics Reliability | LPCVD-silicon oxynitride films: Interface properties Halova, E. and Alexandrova, S. and Szekeres, A. and Modreanu, M. (2005) LPCVD-silicon oxynitride films: Interface properties. : . |
| 2005 | Microelectronics Reliability | Post deposition UV-induced O2 annealing of HfO2 thin films Fang, Q. and Liaw, I. and Modreanu, M. and Hurley, P.K. and Boyd, I.W. (2005) Post deposition UV-induced O2 annealing of HfO2 thin films. : . |
| 2005 | Materials Science and Engineering B: Solid-State Materials for Advanced Technology | Solid phase crystallisation of HfO2 thin films Modreanu, M. and Sancho-Parramon, J. and O'Connell, D. and Justice, J. and Durand, O. and Servet, B. (2005) Solid phase crystallisation of HfO2 thin films. : . |
| 2005 | Optical Materials | Characterisation of room temperature blue emmiting Si/SiO2 multilayers Modreanu, M. and Aperathitis, E. and Androulidaki, M. and Audier, M. and Chaix-Pluchery, O. (2005) Characterisation of room temperature blue emmiting Si/SiO2 multilayers. : . |
| 2005 | Journal of Optoelectronics and Advanced Materials | The influence of Cu on the morphological and chemical properties of nanostructured TiO2 films Gartner, M. and Ghita, A. and Anastasescu, M. and Osiceanu, P. and Dobrescu, G. and Zaharescu, M. and Macovei, D. and Modreanu, M. and Trapalis, C. and Kordas, G. (2005) The influence of Cu on the morphological and chemical properties of nanostructured TiO2 films. : . |
| 2004 | Thin Solid Films | Photoreflectance spectroscopy study of vertical cavity surface emitting laser structures Murtagh, M.E. and Guenebaut, V. and Ward, S. and Nee, D. and Kelly, P.V. and O'Looney, B. and Murphy, F. and Modreanu, M. and Westwater, S. and Blunt, R. and Bland, S.W. (2004) Photoreflectance spectroscopy study of vertical cavity surface emitting laser structures. : . |
| 2004 | Thin Solid Films | Thin Soild Films: Editorial Modreanu, M. and Murtagh, M. and Ricote, J. and Chateigner, D. and Schreiber, J. (2004) Thin Soild Films: Editorial. : . |
| 2004 | Thin Solid Films | Optical properties of silicon thin films related to LPCVD growth condition Modreanu, M. and Gartner, M. and Cobianu, C. and O'Looney, B. and Murphy, F. (2004) Optical properties of silicon thin films related to LPCVD growth condition. : . |
| 2004 | Thin Solid Films | X-Ray reflectivity and spectroscopic ellipsometry as metrology tools for the characterization of interfacial layers in high-κ materials Ferrari, S. and Modreanu, M. and Scarel, G. and Fanciulli, M. (2004) X-Ray reflectivity and spectroscopic ellipsometry as metrology tools for the characterization of interfacial layers in high-κ materials. : . |
| 2004 | Thin Solid Films | Interface of ultrathin HfO2 films deposited by UV-photo-CVD Fang, Q. and Zhang, J.-Y. and Wang, Z. and Modreanu, M. and O'Sullivan, B.J. and Hurley, P.K. and Leedham, T.L. and Hywel, D. and Audier, M.A. and Jimenez, C. and Senateur, J.-P. and Boyd, I.W. (2004) Interface of ultrathin HfO2 films deposited by UV-photo-CVD. : . |
| 2004 | Thin Solid Films | Spectroellipsometric characterization of sol-gel TiO2-CuO thin coatings Gartner, M. and Scurtu, R. and Ghita, A. and Zaharescu, M. and Modreanu, M. and Trapalis, C. and Kokkoris, M. and Kordas, G. (2004) Spectroellipsometric characterization of sol-gel TiO2-CuO thin coatings. : . |
| 2004 | Thin Solid Films | Optical characterization of indium-tin-oxynitride fabricated by RF-sputtering Aperathitis, E. and Modreanu, M. and Bender, M. and Cimalla, V. and Ecke, G. and Androulidaki, M. and Pelekanos, N. (2004) Optical characterization of indium-tin-oxynitride fabricated by RF-sputtering. : . |
| 2003 | Physica E: Low-Dimensional Systems and Nanostructures | Investigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices Modreanu, M. and Gartner, M. and Aperathitis, E. and Tomozeiu, N. and Androulidaki, M. and Cristea, D. and Hurley, P. (2003) Investigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices. : . |
| 2003 | Journal of Applied Physics | Properties of rf-sputtered indium-tin-oxynitride thin films Aperathitis, E. and Bender, M. and Cimalla, V. and Ecke, G. and Modreanu, M. (2003) Properties of rf-sputtered indium-tin-oxynitride thin films. : . |
| 2003 | Materials Science and Engineering B: Solid-State Materials for Advanced Technology | Silicon micromachined sensor for gas detection Moldovan, C. and Hinescu, L. and Hinescu, M. and Iosub, R. and Nisulescu, M. and Firtat, B. and Modreanu, M. and Dascalu, D. and Voicu, V. and Tarabasanu, C. (2003) Silicon micromachined sensor for gas detection. : . |
| 2002 | Sensors and Actuators, A: Physical | Silicon membranes fabrication by wet anisotropic etching Iosub, R. and Moldovan, C. and Modreanu, M. (2002) Silicon membranes fabrication by wet anisotropic etching. : . |
| 2002 | Sensors and Actuators, A: Physical | The etching behavior of APCVD PSG thin films used as sacrificial layers for surface micromachined resonant microstructures Modreanu, M. and Moldovan, C. and Iosub, R. (2002) The etching behavior of APCVD PSG thin films used as sacrificial layers for surface micromachined resonant microstructures. : . |
| 2002 | Sensors and Actuators, A: Physical | Micromachining of a silicon multichannel microprobe for neural electrical activity recording Moldovan, C. and Ilian, V. and Constantin, Ghe. and Iosub, R. and Modreanu, M. and Dinoiu, I. and Firtat, B. and Voitincu, C. (2002) Micromachining of a silicon multichannel microprobe for neural electrical activity recording. : . |
| 2002 | Sensors and Actuators, A: Physical | Microstructural information from optical properties of LPCVD silicon films annealed at low temperature Gartner, M. and Modreanu, M. and Cobianu, C. and Gavrila, R. and Danila, M. (2002) Microstructural information from optical properties of LPCVD silicon films annealed at low temperature. : . |
| 2002 | Surface Science | On the structure, morphology and electrical conductivities of titanium oxide thin films Mardare, D. and Baban, C. and Gavrila, R. and Modreanu, M. and Rusu, G.I. (2002) On the structure, morphology and electrical conductivities of titanium oxide thin films. : . |
| 2002 | User Modeling and User-Adapted Interaction | LPCVD-silicon oxynitride films: Low-temperature annealing effects Alexandrova, S. and Szekeres, A. and Halova, E. and Modreanu, M. (2002) LPCVD-silicon oxynitride films: Low-temperature annealing effects. : . |
| 2002 | Materials Science and Engineering C | Investigation on preparation and physical properties of LPCVD SixOyNz thin films and nanocrystalline Si/SixOyNz superlattices for Si-based light emitting devices Modreanu, M. and Gartner, M. and Cristea, D. (2002) Investigation on preparation and physical properties of LPCVD SixOyNz thin films and nanocrystalline Si/SixOyNz superlattices for Si-based light emitting devices. : . |
| 2001 | International Journal of Inorganic Materials | Elimination of silicon hillocks using an alkaline complexant etching system Moldovan, C. and Iosub, R. and Modreanu, M. (2001) Elimination of silicon hillocks using an alkaline complexant etching system. : . |
| 2001 | Physica Status Solidi (A) Applied Research | Capacitance-Voltage Characterization of LPCVD-Silicon Oxynitride Films Szekeres, A. and Alexandrova, S. and Modreanu, M. (2001) Capacitance-Voltage Characterization of LPCVD-Silicon Oxynitride Films. : . |
| 2001 | Optical Materials | Photonic circuits integrated with CMOS compatible photodetectors Cristea, D. and Craciunoiu, F. and Modreanu, M. and Caldararu, M. and Cernica, I. (2001) Photonic circuits integrated with CMOS compatible photodetectors. : . |
| 2001 | Optical Materials | Investigation on optical and microstructural properties of photoluminescent LPCVD SiOxNy thin films Modreanu, M. and Gartner, M. and Tomozeiu, N. and Seekamp, J. and Cosmin, P. (2001) Investigation on optical and microstructural properties of photoluminescent LPCVD SiOxNy thin films. : . |
| 2001 | Journal of Molecular Structure | Investigation on optical properties of CVD films used in MOEMS applications Modreanu, M. and Gartner, M. (2001) Investigation on optical properties of CVD films used in MOEMS applications. : . |
| 2001 | Thin Solid Films | Microstructural and optical properties of as-deposited LPCVD silicon films Modreanu, M. and Tomozeiu, N. and Gartner, M. and Cosmin, P. (2001) Microstructural and optical properties of as-deposited LPCVD silicon films. : . |
| 2001 | Vacuum | Optical and electrical properties of LPCVD silicon oxynitride films on silicon Szekeres, A. and Alexandrova, S. and Modreanu, M. and Cosmin, P. and Gartner, M. (2001) Optical and electrical properties of LPCVD silicon oxynitride films on silicon. : . |
| 2001 | Thin Solid Films | Physical properties of polycrystalline silicon films related to LPCVD conditions Modreanu, M. and Bercu, M. and Cobianu, C. (2001) Physical properties of polycrystalline silicon films related to LPCVD conditions. : . |
| 1999 | Microelectronics Reliability | Optical characterization of dielectric borophosphosilicate glass Gartner, M. and Modreanu, M. and Bosch, S. and Stoica, T. (1999) Optical characterization of dielectric borophosphosilicate glass. : . |
| 1999 | Thin Solid Films | Optical properties of LPCVD silicon oxynitride Modreanu, M. and Tomozeiu, N. and Cosmin, P. and Gartner, M. (1999) Optical properties of LPCVD silicon oxynitride. : . |
| Year | Publication |
|---|---|
| 2013 | Special issue on "Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012-Symposium W, held in Strasbourg, France, May 14-18, 2012 Modreanu, M,Durand, O,Jellison, GE,Salviati, G,Fried, M (2013) Special issue on "Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012-Symposium W, held in Strasbourg, France, May 14-18, 2012. : . [Details] |